ONTRAK Synergy Integra, Руководство по эксплуатации, Страница: 174 / 350

9-14 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The following table defines Brush Station #1 parameter buttons.
BUTTON NAME & TYPE DESCRIPTION COMMENTS
EXIT SPRAY
:
ON/OFF toggle switch.
Controls the DI water rinsing spray
at the exit of Brush Station #1 and
the entrance to Brush Station #2.
Current status is displayed on
the right side of the button.
ENTRANCE SPRAY :
ON/OFF toggle switch.
(Brush Station #1 only)
Controls the DI water rinsing spray
at the entrance to Brush Station #1.
Current status is displayed on
the right side of the button.
DI LOW FLOW MODE
:
ON/OFF toggle switch.
If DI Low Flow Mode is ON, the low
flow of DI will be turned ON and
remain on after the last processing
EVENT in Brush Station #1 has ended.
If DI Low Flow Mode is OFF, the
low flow of DI will be turned off
and remains off at the end of the
last EVENT in Brush Station #1. DI
will remain off until the next wafer
is processed using DI water.
Current status is displayed on
the right side of the button.
Warning: If DI Low Flow 2-way
air controlled fluid valves are
installed and the recipe has DI
LOW FLOW MODE toggled
OFF, then the system will not
flow DI water to the brushes
while not processing wafers or
in STOP mode. Do not leave the
system in this condition for
more than an hour. The Brushes
will dry out!
PROCESS ALARM
TIMEOUT
:
Defining button which
brings up NUMBER PAD.
Set time out for Alarm #158.
PROCESS ALARM TIMEOUT,
FLUSH DURATION, and ALARM
BRUSH MODE work together.
PROCESS ALARM TIMEOUT is
the programmable time out alarm
(Alarm #158) for Brush Station #1.
(Parameter range: 0 - 65535 .
Entered value in 10
th
of seconds. If
set to
0
, disables setting and Alarm
#158.) If set to a value grater than
0 then the brushes and rollers stop
turning.
Current status is displayed on
the right side of the button.
The value on the screen is
shown in seconds .
FLUSH DURATION
:
Defining button which
brings up NUMBER PAD.
PROCESS ALARM TIMEOUT,
FLUSH DURATION, and ALARM
BRUSH MODE work together.
FLUSH DURATION controls the
amount of time DI High Flow will
be on to flush the brush/wafer
once Alarm #158 is posted.
(Parameter range: 0 - 65535 .
Entered value in 10
th
of seconds. If
set to 0 , disables setting and Alarm
#158.) Once alarm #155 is posted,
the system is placed in CLEARING
mode.
Current status is displayed on
the right side of the button.
The value on the screen is
shown in seconds .