ONTRAK Synergy Integra, Руководство по эксплуатации

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C h a p t e r 8 S M O O T H WA F E R T R AV E L C H E C K L I S T
7/26/00 INTEGRA Operations Revision A 8-3
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
18 Visually inspect the alignment of the spindle fingers with the edges of the wafer
on the carriage. When the spin fingers close on the wafer, the fingers should lift
the wafer slightly off the carriage track. When the spin fingers first touch the
wafer, the wafer should be 1 - 2 mm lower than the center of the finger groove.
When the fingers close the second time, the wafer moves up and off the track.
Wafer in spindle fingers after pick up from the Carriage.
ILLUSTRATION: Spindle at Mid Position with Carriage Retracted.
19 Visually inspect the air gap between the wafer and carriage o-rings. The air gap
should be approximate
1-2 mm
. Perform this inspection by opening the Spin Station
door and insert an inspection mirror to the right hand side of the wafer. Visually
inspect the gap between the top side of carriage and the bottom side of wafer.
20 As the carriage moves out from under the wafer, watch and listen for signs of
contact or skidding. (Skidding increases particulate contamination.)
21 Verify that the wafer is centered in each spindle finger. Also verify that the
spindle is smoothly retracted into the catch cup. The spindle motor operation
should be smooth and free from any jerking movement.
Use the DC Motor Controller Board Calibration procedure in the Maintenance
manual to adjust the spindle motor.
Use the Spindle Motor Speed Calibration procedure in the Maintenance manual to
adjust the spindle motor speed.
22 Check the operation of the spindle brake by opening the Spin Station door
while a test wafer is processing. To aid in breaking, the system reverses the
polarity of the spin motor. The spindle should stop almost immediately.
Open the SPIN STATION I/O screen and deactivate the SPINDLE LOCK
SOLENOID button so the spindle lock is disengaged from the spindle shaft. Use
the Spin Station I/O screen to control the brake by activating the SPIN INHIBIT
RELAY button. Check the operation of the brake by trying to rotate the spindle in
the reverse direction. As the spindle is turned clockwise, feel for resistance
against the turn. REMEMBER TO RESET THE LOCK AFTER THE TEST.
23 Check the operation of the spin lock mechanism. Make sure that spin lock is
quick and positive, and that the spindle does not drift after the lock is engaged.
Smooth Wafer Travel Checklist
# VISUAL INSPECTION AREA YES NO
Wafer moves up
Fingers in