ONTRAK Synergy Integra, Руководство по эксплуатации, Страница: 268 / 350

10-30 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Troubleshoot: To aid in troubleshooting the failure, record the
station states on the
SYSTEM STATUS
screen, before clearing the
alarm. Series II CE and Synergy systems using output robot (e.g.,
SMIF, PRI, etc.) in CONTINUOUS mode can generate Alarm 91, 90,
and 46 (in that order) if the output robot’s cycle time and operator
pod (cassette) handling time exceeds the three minute delay time.
Disposition: The Spin Station program will not continue until the
Unload Handler has acknowledged that it has taken the wafer.
GEM ALID: 46
GEM Alarm.
A
LARM
ID: 47
Description: Spin Time-out Waiting For Rotation Arm To
Complete
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason: After the spin fingers have opened and the Unload
Handler is told to remove the wafer, a check is made on the
rotation arm home sensor and the rotation arm at output sensor. One
of these sensors must detect the rotation arm in order for the Spin
Station program to know that the rotation arm is all the way out
of the station. This alarm indicates that neither sensor detected
the arm.
Disposition: The Spin Station program will not continue until
either the rotation arm home or rotation arm at output sensor is
detected.
GEM ALID: 47
GEM Alarm.
A
LARM
ID: 48
Description: Spin Time-out Waiting For Rotation Arm To
Complete
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason:
After the rotation arm is reported to have moved out of
the Spin Station, the Unload Handler must report that the
rotation arm is at the Output Station with the output cassette
ready. If this condition is not met, the alarm is posted.
ALCD ALTX ON CEID OFF CEID
6 46 Time-out in Spin waiting on Unload Handler. 293 294
ALCD ALTX ON CEID OFF CEID
6 47 Spin Time-out waiting for Rotation Arm to
complete.
295 296