ONTRAK Synergy Integra, Руководство по эксплуатации, Страница: 274 / 350

10-36 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A
LARM
ID: 63
Description: Time-out Looking For Carriage Retract Sensor
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason: The carriage is driven by a DC motor. The motor first
runs at a high speed, then after a calculated time, runs at a slower
speed. Once the motor slows, the
carriage retract sensor is
monitored to know when to stop the motor. If the carriage retract
sensor is not activated after a specified number of attempts to
retract the carriage, the alarm is posted.
Disposition: The Spin Station program will not continue until the
carriage retract sensor reports the carriage in the retracted
position.
GEM ALID: 63
GEM Alarm.
A
LARM
ID: 64
Description: Time-out Looking For Spin Finger Open Sensor
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason: When the spin fingers are told to open, the spin finger
open sensor is monitored. If after 10 seconds, the sensor does not
report the open position, this alarm is posted.
Disposition: The Spin Station program will not continue until the
spin finger open sensor reports the spin fingers in the open position.
GEM ALID: 64
GEM Alarm.
A
LARM
ID: 65
Description: Time-out -Trying To Close Spin Fingers Open Sensor On
Posting Program: Spin Station
Alarm Type: Alarm & Sonalert
Reason: When the spin fingers are told to close and grip a wafer,
the spin finger open sensor is monitored. When a wafer is actually
in the fingers and the closed sensor signal is not received, the s pin
finger open sensor is the only way to tell the position of the spin
fingers. If after 10 seconds, the s pin finger open sensor still reports
the fingers in the open position, the alarm is posted.
ALCD ALTX ON CEID OFF CEID
6 63 Time-out looking for Carriage Retract Sensor. 327 328
ALCD ALTX ON CEID OFF CEID
6 64 Time-out looking for Spin Finger Open
Sensor. 329 330