ONTRAK Synergy Integra, Руководство по эксплуатации

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3-24 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
SPIN STATION
The Spin Station is designed to dry the cleaned wafer. The Spin
Station is composed of:
a cover
a retractable carriage conveyor platform
an edge handling spin assembly
a vertical spindle assembly with power loss safety lock
a drying lamp
a sensors
a megasonic assembly (option)
a spin exit tunnel (Output Robot) sensor
an ULPA filter (option)
R
ETRACTABLE
C
ARRIAGE
(C
ONVEYOR
P
LATFORM
)
Wafer Transfer and Positioning
The retractable carriage is similar in function to the conveyors in the
first three stations. The retractable carriage is situated directly over
the spin assembly which drys the wafer. Three infrared sensors (all
identified with
WAFER SENSOR
in the
SPIN STATION I/O
screen) are
located in an array, positioned strategically across the carriage. The
emitters are contained in the arms which extend over the track with
the receivers directly beneath the emitters, under the roller level in
the track. After it is detected by the
WAFER SENSOR
array, the
incoming wafer travels for a set period of time, depending on the
wafer size. The time, set in the SPIN XPORT DELAY counter, stops
the wafer precisely over the spin assembly. A mechanical stop,
positioned on the carriage conveyor, prevents the wafer from
traveling too far if the travel time setting is incorrect or if the sensor
fails. The wafer should
not contact the mechanical stop if the travel
time is properly set.
In addition to the transport function, the carriage is designed to retract
from over the spin assembly to allow the spindle fingers to transport
the wafer down into the catch cup for the spin dry procedure.
The spindle fingers are oriented by a mechanical lock (see Spindle
Lock below) which situates them so they rise between the carriage
conveyor rollers, in position to receive the wafer from the conveyor
and transport it into the catch cup. Once the fingers are closed on the
wafer, the carriage is retracted. The carriage movement is
accomplished by an electric motor. Flag sensors signal when the
carriage is in the required position,
OUT
(
CARRIAGE RETRACT SENSOR)
or
IN
(
CARRIAGE EXTEND SENSOR
).