ONTRAK Synergy Integra, Руководство по эксплуатации

Страница: 151 / 350

C h a p t e r 7 O P T I O N A L P R O C E S S S E T T I N G S
7/26/00 INTEGRA Operations Revision A 7-11
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
MAINTENANCE ALARMS
Numerous maintenance requirements exist for the Integra. Some of
these requirements, such as the replacement of edge cleaning roller
pads, correlate to the number of wafers processed through the
system. In the
SYSTEM OPTIONS
screen there are two operator
controlled wafer count maintenance alarms, Maintenance Alarm 1
and Maintenance Alarm 2. Each alarm can serve as a reminder for
prescribed maintenance tasks.
The operator/technician should also keep a written record (log) of
the specific maintenance issues (e.g., edge cleaning pad replacement)
associated with each maintenance alarm.
When the number of wafers specified (setpoint) in one of the
maintenance alarms is reached or exceeded, either the Maintenance
Alarm 1 or Maintenance Alarm 2 message displays in the
CURRENT
ALARM
box on the
SYSTEM STATUS
screen.
Use the following procedure to set a Maintenance Alarm.
1 From the
MAIN MENU
screen, touch the SELECT OPTIONS button.