ONTRAK Synergy Integra, Руководство по эксплуатации

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C H A P T E R 9
7/26/00 INTEGRA Operations Revision A 9-1
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
950
P R O C E S S R E C I P E
PASSWORD OR KEY
REQUIRED
Multiple Process Recipes can be defined for the Integra. Each Process
Recipe has numerous variables which can be set or changed to
accommodate different processing specifications, including High
Productivity Dispense (HPD). This chapter uses screens from the
2.2.3 version of the Integra’s OS 9 software.
To define or change a
Process Recipe, start by accessing the
PROCESS PROGRAM
MANAGEMENT SCREEN.
A
NOTE:
Changing Process Chemistries - In order to change system chemistries (e.g.,
HF to Hi Toxic MCC 3000) hardware and/or system software must be changed.
However, simple Process Recipe event changes and/or flow meter adjustments do not
require hardware and system software changes.
CHANGE PROCESS RECIPE
The current Process Recipe cannot be changed while wafers are
being processed. If wafers are being processed, clear all wafers
before attempting to change the current Process Recipe.
Use the following procedure to edit (change) a Process Recipe.
1 From the
MAIN MENU
, touch ENGINEERING MENU to display
the
ENGINEERING MENU
screen.
STANDARD
Current Process Status Box