ONTRAK Synergy Integra, Руководство по эксплуатации

Страница: 41 / 350

C h a p t e r 3 S Y S T E M C O N F I G U R AT I O N
7/26/00 INTEGRA Operations Revision A 3-3
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
INPUT STATION
The Integra Input Station begins the individual wafer cleaning
process. Wafers are sequentially transferred (one at a time) from the
Input Robot into the Input Station. The Input Station starts each
wafer traveling through the system.
I
NPUT
S
TATION
D
OOR
The Input Station Door must open before the Input Robot arm
(paddle) can move into the Input Station and transfer the wafer. Wafer
transfer control is by GEM interface. The wafer DI water rinse does
not start until the door closes.
W
AFER
C
ONVEYOR
The two Input Station transport tracks are motorized conveyors
which receive the wafer from the Input Robot arm and moves the
wafer to Brush Station #1. Small belts wrapped around the conveyor
wheels provide wafer transport with minimum contact.
E
NTRANCE
R
INSE
A preliminary rinse of the wafer is required before the brushes
contact the wafer. When the Input Station door closes, DI water is
sprayed from four manifolds (six nozzles) to rinse off large wafer
polishing contaminants and to keep the wafer wet.
I
NPUT
S
TATION
L
ID
The mechanically locked (hex key) Input Station lid protects the
processing environment from contamination and can be manually
opened. A magnetic sensor is mounted on the front of the lid to
signal when the lid is closed. The
LID CLOSED
sensor status can be
viewed in the
INPUT STATION INPUT/OUTPUTS
screen.
A
NOTE!:
If the Input Station lid is opened, the magnetic sensor signals the lid status and
the spray is halted until the lid is securely closed. If the lid is left open for an extended
period of time, the wafer can dry out.
W
AFER
C
ONVEYOR
The transport track is a motorized conveyor which transfers the
wafer to Brush Station #1. Small belts, wrapped around the conveyor
wheels, provide wafer transport with a minimum amount of contact.
S
ENSORS
Eight sensors and three solenoids/switches monitor and/or control
Input Station activity. Sensors are described in the following table and
are listed in the order that they are displayed on the
INPUT STATION
I/O
screen. Solenoid/switch descriptions follow sensor descriptions.