ONTRAK Synergy Integra, Руководство по эксплуатации

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3-2 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The following conditions are necessary for this process to be activated:
The INPUT Station is indexing, i.e., looking for a wafer.
The BRUSH, SPIN, UNLOAD HANDLER and OUTPUT Stations
are idle, i.e., ready for a wafer.
The system is not in wafer recovery mode.
The period that ammonia is delivered to the Brush Station brushes is
user programmable between 1 and 60 seconds and can be found in
the
INPUT STATION I/O
screen. This is accessible from the
MAINTENANCE
screen by pressing the VIEW I/O button of the
INPUT STATION I/O
screen.
Light Tower Options
Ten system light tower options are currently available. These
descriptions are only valid after the cleaner has been initialized. Light
tower options are listed in the “Software Release Document” in the
Appendix of the Integra Installation Manual. Also, see the light
tower options in “Signal Light Tower,” on page 4-17.
Remote
Light Tower
Allows operation of a second light tower with any of the following
options. The second light tower displays the same information as the
primary light tower, but at a remote location.