ONTRAK Synergy Integra, Руководство по эксплуатации, Страница: 89 / 350

C h a p t e r 4 P R O C E S S D E S C R I P T I O N
7/26/00 INTEGRA Operations Revision A 4-11
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
W
AFER
T
RANSFER
O
UT
(N
O
F
LAT
F
INDER
)
When the Spin Station is ready for a wafer, the top brush slows to
idle speed and lifts off of the wafer in Brush Station #2, the rollers
retract, and the conveyor activates to transport the wafer into the
Spin Station.
As the wafer transfers out of Brush Station #2, a manifold located at
the exit sprays DI water (top and bottom) to rinse the wafer.