ONTRAK Synergy Integra, Руководство по эксплуатации

Страница: 55 / 350

C h a p t e r 3 S Y S T E M C O N F I G U R AT I O N
7/26/00 INTEGRA Operations Revision A 3-17
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
F
LAT
F
INDER
(
OPTION
)
In systems that process wafers with flats, the wafer flat must face the
exit end of the machine when it enters the Spin Station. This is
accomplished in Brush Station #2 where an infrared sensor, located on
one of the roller chucks, detects the wafer flat, so that the system can
stop the flat when it is facing the Spin Station. This allows the Spin
Station to process the wafer and send it out in that same orientation.
A
NOTE!:
The flat finder must be deactivated for systems processing wafers without flats.
This is accomplished in the
BRUSH STATION DEFINE PROCESS SCREEN
, for the #2 Brush
Station. Set the Flat Finder Speed to “0” to deactivate it and prevent an alarm. (See “Alarm
ID: 25,” on page 10-22.) Set the speed to the desired number to activate the flat finder.
S
ENSORS
Seventeen sensors and sixteen solenoids/switches monitor and/or
control Brush Station #2’s activity. Sensors are described in the following
table and are listed in the order that they are displayed on the
SECOND BRUSH STATION I/O
screen. Solenoid/switch descriptions
follow sensor descriptions.
S
ENSOR
D
EFINITIONS
SECOND BRUSH STATION INPUTS (Sensors)
SENSOR NAME TYPE AND LOCATION FUNCTION
EXHAUST BAFFLE
OPEN SENSOR
Hall Effect Sensor: At the
bottom rear of Brush
Station #1.
Icon is green when the Brush Station #1
baffle is OPEN. This occurs when the Brush
Station lid is OPEN, so high flow exhaust is
provided for Brush Station #2.
EXHAUST BAFFLE
CLOSED SENSOR
Hall Effect Sensor: At the
bottom rear of Brush
Station #2.
Icon is green when the baffle is CLOSED.
This provides the low flow exhaust that is
required for Brush Station #2 when the Brush
Station lid is CLOSED.