ONTRAK Synergy Integra, Руководство по эксплуатации

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C h a p t e r 1 0 A L A R M S
7/26/00 INTEGRA Operations Revision A 10-79
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
I
NTEGRA
(CMP) S
PECIFIC
GEM M
ESSAGES
The following GEM message are exclusively used for the Integra
cleaner. These messages are used
in addition to the messages in the
OnTrak DSS-200 (Integra) SECS/GEM Interface Manual (20-0200-
055/056). GEM manuals are shipped as part of the standard
documentation package with each cleaner using a GEM interface.
Appendix A --
Variables
Material movement on the Integra cleaner consists of three
components. The interchange between the Input Robot and the
Input Station, wafer processing, and the interchange between the
Spin Station and the Output Robot. In order for wafer processing to
begin, a wafer must be placed on the Input Station conveyor by the
Input Robot and the Input Station door (not lid) closed. The Integra
recognizes a wafer is present for processing, processes the wafer,
then positions the wafer in the Spin Station for the Output Robot to
remove the wafer. The SV, EC and DVVALS variables are used in
this wafer movement. The following GEM specific variables (next
page) should be added to Appendix A -- Variables for the Integra.
VID Class Format VID Description
65 SV U1 TIMEFORMAT (Only use for rev 2.0.1 and
0 = 12 byte format above - Y2K.)
1 = 16 byte format
108 SV U1 INPUTSTATIONREADY
0 = not
1 = present
109 SV U1 INPUTDOOROPEN
0 = not
1 = present
110 SV U1 INPUTDOORCLOSED
0 = not
1 = present
111 SV U1 INPUTWAFERACCEPTED
0 = not
1 = present
112 SV U1 OUTPUTSTATIONREADY
0 = not
1 = present
113 SV U1 OUTPUTFINGERSOPEN
0 = not
1 = present
114 SV U1 WAFERSTATUS
0 = not
1 = wafer present
bit 0 = Input Station
bit 1 = Brush Station #1
bit 2 = Brush Station #2
bit 3 = Spin Station
115 SV U1 STARTSTOP
0 = not
1 = pause