ONTRAK Synergy Integra, Руководство по эксплуатации

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vi INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Revision History
This manual is new. It includes updated material from the five-volume Synergy
Integra manual set, p/n 20-0200-222 (standard) and p/n 20-0200-221 (clean room),
as follows:
Chapter 1—Introduction. Revised version of Chapter 1, Introduction, in Volume 1,
Operations.
Chapter 2—Safety. Revised version of Chapter 2, Safety, in Volume 2, Operations.
Chapter 3—System Configuration. Revised version of Chapter 3, System
Configuration, in Volume 2, Operations.
Chapter 4—Process Description. Revised version of Chapter 4, Process
Description, in Volume 2, Operations.
Chapter 5—Normal Operation. Revised version of Chapter 5, Normal Operation,
in Volume 2, Operations.
Chapter 6—Start-up After EMO. Revised version of Chapter 6, Start-up After EMO
& Wafer Recovery, in Volume 2, Operations.
Chapter 7—Optional Process Settings. Revised version of Chapter 7, Optional
Process Settings, in Volume 2, Operations.
Chapter 8—Smooth Wafer Travel Checklist. Revised version of Chapter 8, Smooth
Wafer Travel Checklist, in Volume 2, Operations.
Chapter 9—Process Recipe. Revised version of Chapter 9, Process Recipe, in
Volume 2, Operations.
Chapter 10—Alarms. Revised version of Chapter 10, Alarms, in Volume 2,
Operations. The contents of pages 4-12 through 4-86 of this chapter (alarm
handling and alarm descriptions) are also included in Chapter 4, Alarms, in
Volume 3, Troubleshooting.
Chapter 11—GEM Configuration & Messages. Revised version of Chapter 11,
GEM Configuration & Messages, in Volume 2, Operations.
Chapter 12—System Security. Revised version of Chapter 12, System Security, in
Volume 2, Operations.
Chapter 13—Technical Bulletins (provided to store Lam Technical Bulletins). No
change.