ONTRAK Synergy Integra, Руководство по эксплуатации

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8-2 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
7 In Brush Station #1, measure to ensure that the wafer is centered, front to back,
between the brushes. Measure from the box wall to the outside of roller hub.
Both measurements should be identical.
.
(In Brush Station #2, the wafer travel must be aligned with the Spin Station.
Misalignment may cause wafers to be slightly off center.)
8 Visually check that the wafers are centered side to side in the brush box. To
measure, use the reflection of the brush to the edge of the wafer.
9 Carefully inspect the brushes for bunching, miss aligned rows, missing and/or
cracked nodules.
10 Visually verify that the conveyor drive belts are not slipping on the drive
pulleys or track pulleys. The conveyors should smoothly transfer the wafer.
11 Observe the rotation of the wafers in the rollers. The rotation should be smooth
and consistent.
12 Observe the exit spray. It should be ON when the wafer exits Brush Station #2.
13 Verify that the spindle fingers do not open so wide that they contact the carriage
when the carriage moves in. Adjust fingers using the Spin Figure Adjustment
procedure in the Maintenance manual.
14 Inspect carriage transport conveyor shafts for radial warpage, shafts should
rotate true within 0.5 mm.
15 An incoming wafer on the Spin Station carriage should stop exactly centered over
the spindle fingers (not too far or short). The wafer should NOT contact the wafer
emergency stop fixture. If the wafer touches the fixed stop, adjust “SPIN XPORT
DELAY” in the SYSTEM OFFSET MAINTENANCE SCREEN.
16 Wafers should come to rest in the same spot on the carriage each time. Wafers
should never “bump” the side of the carriage. (Brush #2 rollers should align the
wafer with the Spin Station carriage, and center the wafer over the spindle
fingers.) There should be no side-to-side wafer movement when the spindle
fingers close on the wafer.
17 IN and OUT carriage movement should be smooth. The total movement time
should be at least 1 second.
Smooth Wafer Travel Checklist
# VISUAL INSPECTION AREA YES NO
Remove the roller and
measure from the truck
assembly to the trans-
port conveyor assembly
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2
1
2