ONTRAK Synergy Integra, Руководство по эксплуатации

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6-6 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
3 If a wafer passes into the next station and the sensor in the
receiving station fails to detect the wafer after the proper transfer
time has elapsed, a “waiting for wafer” alarm is posted. The
system will continue waiting to detect the wafer until the system
is manually halted. The
SYSTEM STATUS
screen will show the
presence of a wafer in a station where there is no wafer and will
show its presence where it now resides. When wafers are lost in
this way, touch the RESET button in the sending station’s column
on the
SYSTEM STATUS
screen to correct that part of the error. The
failed sensor must be adjusted or repaired before wafer recovery
can be used to restore the system to normal operation.
4 If the CPU expects a wafer and sensors do not detect it, as can
happen with a broken wafer, an alarm is posted.
Lost wafer conditions can occur in the Spin Station, Brush Station #1
or Brush Station #2. When one of these errors occur, the system
processing will either be halted by the CPU or the operator is
required to press the STOP button. An alarm will inform the
operator that a wafer detection error has occurred or that there is a
“Lost Wafer” situation. It is then up to the operator to place the
system in the Wafer Recovery mode.
Lost wafers in the Input Robot/Input Station and Spin Station/
Output Robot may require separate Robot lost wafer recovery
procedures which may include manual intervention and/or issuing
GEM commands/messages from the CMP host system’s operator
console,
not the Integra’s operator console.
R
ECOVERY
P
ROCEDURE FOR
P
ROCESS
F
AILURE
The wafer recovery procedure is automated to provide a smooth
recovery process with a minimum of operator intervention. When
the system fails to detect a wafer that is expected in a station, or
detects a wafer where it does not expect one, or detects a wafer
where no wafer is actually present, the operator may be required to
press the STOP button on the operator control panel if the system is
not automatically placed in STOP.
STEP PROCEDURE COMMENTS
1 To initiate Wafer Recovery, touch the
WAFER RECOVERY button in the MAIN
MENU screen. This displays the wafer recovery message
window.
2 In the WAFER RECOVERY message
window, touch the
YES button next to the
question, “ Start wafer recovery? ”
See the illustration below.