ONTRAK Synergy Integra, Руководство по эксплуатации

Страница: 36 / 350

2-12 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Pneumatics System
When maintenance on the pneumatic system is going to require any
lines to be detached or a pneumatic component to be disconnected,
the pneumatic supply must be turned OFF and detached.
ULPA Filter
Always keep the ULPA filter operating at all times. However, when
maintenance is required on the ULPA filter, the tunnel between the
Spin Station and clean room
must be properly sealed in order to
maintain the integrity of the clean room environment.
G
ENERAL
O
PERATIONAL
S
AFETY
Removing Wafer Fragments
If a wafer breaks during processing, clear or remove any wafers from
the system, if possible, and reset the stations before accessing the
affected area. Use tweezers to remove broken fragments. Vacuum the
affected area after fragments are removed.
Fragments are very sharp
and can cause severe lacerations if improperly handled.
Heavy Loads
Due to the weight and bulkiness of the Spin Station cover and the
ULPA filter (top heavy), removal of either one requires two people.
To avoid injury to personnel and equipment, always use two people.
Purge Procedure
All module covers must be in place when purging the system. The
spindle must be in the BOTTOM position or water will leak down
the spindle onto the motor and cause severe damage to the system.
Spin Motor Protection
Never run the high speed spin motor with the spindle assembly in
the TOP position or with the spindle lock engaged.
UV/IR Radiation
The system heat lamp is a source of IR (infrared) radiation. The IR
radiation levels are 6.9 mW/cm
2 at a distance of 12 inches from the
lamp with the external cover open, and 1.1 mW/cm 2 with the cover
closed. Do not operate the system heat lamp with the cover open.
RF Radiation
The optional Megasonic ultrasonic generator is a source of RF
radiation. This unit has been tested and found to comply with FCC
regulations.
The Integra system with the Megasonic ultrasonic generator has
been tested by an independent testing laboratory (ETL) and was
found to comply with SEMI S2-93 requirements.
ETL report 546247.