ONTRAK Synergy Integra, Руководство по эксплуатации, Страница: 57 / 350

C h a p t e r 3 S Y S T E M C O N F I G U R AT I O N
7/26/00 INTEGRA Operations Revision A 3-19
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
BACK LIFTER
HOME SENSOR
(Lifts back end of
brush.)
Optical Interrupt, Flag
Sensor . Located in the
micro stepper driver
assembly (inside the metal
box attached to the micro
stepper motor and the
driver), below the Brush
Station #2 brush motor on
the system back side.
Indicates when the stepper
motor plunger is in the
HOME (down) position,
causing the brush to lift off
the wafer. (Brush is
attached to a rocker arm,
opposite the plunger.)
Icon is green when the back lifter is in the
HOME position and red when the lifter is not
in the HOME position.
BACK LIFTER
EXTEND SENSOR
(Lowers back end of
brush.)
Optical Interrupt, Flag
Sensor
. Located in the
micro stepper driver
assembly (inside the metal
box attached to the micro
stepper motor and the
driver), below the Brush
Station #2 brush motor on
the system back side.
Indicates when the stepper
motor plunger is in the
EXTEND (up) position,
causing the brush to move
down into the wafer
cleaning position. (Brush is
attached to a rocker arm,
opposite the plunger.)
Icon is
green
when the back lifter is in the
EXTEND position and red when the lifter is
not in the EXTEND position.
FRONT LIFTER
HOME SENSOR
(Lifts front end of
brush.)
Optical Interrupt, Flag
Sensor . Located in the micro
stepper driver assembly
(inside the metal box
attached to the micro
stepper motor and the
driver), on the system front
side, directly opposite from
the Brush Station #2 back
side micro stepper
assembly. Indicates when
the stepper motor plunger
is in the HOME (down)
position, causing the brush
to lift off the wafer (brush is
attached to a rocker arm,
opposite the plunger).
Icon is green when the front lifter is in the
HOME position and red when the lifter is not
in the HOME position.
SENSOR NAME TYPE AND LOCATION FUNCTION