ZYGO KMS-310, Supervisor Manual

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6-14 Chapter 6: Creating Automated Scripts
Script Creation
Overview
The basic steps you will take to create a script include:
1.
Plan the script.
2. Locate edge features.
3. Set up align and deskew parameters for the mask.
4. Set up planarity for the mask.
5. Obtain substrate information.
6. Move to the features to be measured.
7. Call the measurement subroutine.
8. Suggest order of script sequence.
Plan the Script
The best scheme for creating a script is to first visualize the device (or feature) on a
sheet of paper. As you draw the device roughly to scale:
ƒ
Draw the windows to set up the sequence windows for feature measurement in the
X-, Y- or Z-axis.
ƒ
Imagine how the part will be found if the stage does not position it correctly.
ƒ
Identify any distinct features to look for as a pattern recognition routine that can
assist in centering the part.
Locate Feature Edges
Use pattern recognition to find the top, bottom, left and right edges of the feature. First,
calculate the centroid of the feature. Next, calculate the offset from screen center.
Finally, try to center the feature on the screen using RELMOVE: commands.
Once the feature is centered, use pattern recognition again to get the new top, bottom,
left and right edges. This will enable you to set up the sequence windows for measuring
the line, space and pitch. Be careful to set the windows near a fiducial so that the
measurement windows can be located accurately and consistently.
It is recommended that you set up this portion of the script using an OPMARK:
command. This facilitates testing the measurement/pattern recognition feature centering
commands and enables a quick edit/run/debug mode (reducing cycle time).
Once the measurement subroutine is stable and robust, you can set up the script.