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ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor's Manual 

iii

Move to Features to be Measured ...................................................................................................................... 6-15 

Call the Measurement Subroutine ....................................................................................................................... 6-16 

Suggested Order of Script Sequence .................................................................................................................. 6-16 

E

XAMPLE 

S

CRIPT

 ....................................................................................................................................................... 6-17 

Example Script .................................................................................................................................................... 6-17 

S

CRIPT 

L

OCATOR

 ....................................................................................................................................................... 6-22 

Listing by Alphabetical Order .............................................................................................................................. 6-22 
Listings by Function ............................................................................................................................................. 6-30 

Comment and Debug Commands ....................................................................................................................... 6-30 

Stage, Column, and Optical Positioning and Turret Command ........................................................................... 6-33 

Illumination Values Commands ........................................................................................................................... 6-34 
Z-Axis Position Commands: Piezo Stack ............................................................................................................ 6-35 

Z-Axis Position Commands: Column Motor ........................................................................................................ 6-35 

X-, Y-Axis Position Commands: Stage Motors .................................................................................................... 6-36 

Planarization Commands .................................................................................................................................... 6-38 
Operator Interface Commands ............................................................................................................................ 6-39 

Data Output Matrix Commands ........................................................................................................................... 6-41 

Log File Commands ............................................................................................................................................ 6-42 

Script Flow Commands ....................................................................................................................................... 6-43 
Edge Detection Pattern Recognition Commands ................................................................................................ 6-44 

Bitmap/Image Pattern Recognition Commands .................................................................................................. 6-44 

Autofocus Commands ......................................................................................................................................... 6-45 

Find Surface Command ...................................................................................................................................... 6-45 
Fast Focus Commands ....................................................................................................................................... 6-46 

Column Focus Command .................................................................................................................................... 6-47 

S

CRIPT 

C

OMMANDS

 ................................................................................................................................................... 6-48 

AF_EXEC ............................................................................................................................................................ 6-48 
AF_SET ............................................................................................................................................................... 6-48 

AF_STAT ............................................................................................................................................................. 6-48 

ALIGN .................................................................................................................................................................. 6-49 

BOX ..................................................................................................................................................................... 6-49 
CALL ................................................................................................................................................................... 6-49 

CLEARPIC .......................................................................................................................................................... 6-50 

CLOCK ................................................................................................................................................................ 6-50 

COMMENT .......................................................................................................................................................... 6-50 
DEBUG ................................................................................................................................................................ 6-51 

DESKEW ............................................................................................................................................................. 6-51 

EDGES ................................................................................................................................................................ 6-52 

EDGEPOS ........................................................................................................................................................... 6-53 

EDGEROUGHNESS (EDGER) ........................................................................................................................... 6-54 
END ..................................................................................................................................................................... 6-55 

ERASE ................................................................................................................................................................ 6-55 

EXIT .................................................................................................................................................................... 6-55 

FASTSURF ......................................................................................................................................................... 6-55 
FF_SET ............................................................................................................................................................... 6-56 

FF_WIN ............................................................................................................................................................... 6-56 

FINDSURF .......................................................................................................................................................... 6-56 

FOCUSFAST ....................................................................................................................................................... 6-57 
FOCUSIMG ......................................................................................................................................................... 6-57 

GETMOTCNTS ................................................................................................................................................... 6-57 

GETPOS ............................................................................................................................................................. 6-57 

GETSTOP ........................................................................................................................................................... 6-58 
GETTEXT ............................................................................................................................................................ 6-58 

GETVAR .............................................................................................................................................................. 6-58 

GETWIN .............................................................................................................................................................. 6-59 

GET_MOT_Z ....................................................................................................................................................... 6-60 

Summary of Contents for KMS-310

Page 1: ...KMS 310 400 Supervisor s Manual October 1998 Zygo Corporation Advanced Imaging Systems 650 North Mary Avenue Sunnyvale CA 94086 Telephone 408 434 1000 Fax 408 434 0759...

Page 2: ...om the copyright owner KMS 310 400 is a trademark of Zygo Corporation Notice The information contained in this document is subject to change without notice Zygo Corporation makes no warranty of any ki...

Page 3: ...2 12 Mercury Lamphouse 2 12 Xenon Lamphouse 2 12 ISOPROPYL ALCOHOL SAFETY 2 13 Potential Hazards 2 13 Emergency Response 2 14 MERCURY SAFETY 2 16 Potential Hazards 2 16 Emergency Response 2 16 MACHINE...

Page 4: ...CALIBRATION PARAMETERS 5 14 Select Calibration Parameters 5 15 Calibrate the Microscope 5 15 Calibrate Horizontal Settings 5 16 Calibrate Vertical Settings 5 16 Configure Single point Calibration 5 17...

Page 5: ...zation Commands 6 38 Operator Interface Commands 6 39 Data Output Matrix Commands 6 41 Log File Commands 6 42 Script Flow Commands 6 43 Edge Detection Pattern Recognition Commands 6 44 Bitmap Image Pa...

Page 6: ...NU 6 69 MASK_ORIGIN 6 69 MASK_PLANE 6 70 MARK 6 71 MATH 6 71 MATRIXCLEAR 6 72 MATRIXCLOSE 6 73 MATRIXOPEN 6 73 MATRIXSET 6 74 MATRIXVALUE 6 74 MATRIXWRITE 6 75 MEASURE 6 76 MEASURE_ALGORITHM 6 76 MENU...

Page 7: ...REL_POLZ_NM 6 91 RESULT 6 91 RETURN 6 92 RP_DISPLAY 6 92 RP_EXEC 6 92 RP_READ 6 92 RP_WIN 6 92 SEQEDGE 6 93 SEQNAME 6 94 SEQOUTPUT 6 94 SEQWIN 6 94 SETSTOP 6 95 SHOWPIC 6 95 SILENT 6 95 SITENAME 6 95...

Page 8: ...Statistics 7 43 Manage ID Entries 7 44 Configure a Data Map 7 45 CHAPTER 8 MAINTENANCE 8 1 OVERVIEW 8 2 Preventive Maintenance Schedule 8 2 Maintenance Procedures Overview 8 4 LAMP REPLACEMENT AND ALI...

Page 9: ...ipment A 8 Storage and Handling Precautions A 8 Transportation Data and Additional Information A 9 MSDS FOR MERCURY METAL A 10 Product Identification A 10 Hazardous Components A 11 Physical Data A 12...

Page 10: ...Contents viii...

Page 11: ...About This Manual Intended Audience Manual Organization Conventions Contacting Technical Support 1...

Page 12: ...the KMS 310 400 system and includes an overview of subsystem components as well as a theory of operation for the measurement process Chapter 4 User Interface provides an overview of supervisor mode s...

Page 13: ...or notes to the reader are emphasized with the following convention L Tip This text can be used for special notes examples or tips The only difference will be the first word which will read as note ti...

Page 14: ...pport For technical assistance contact your Zygo Service or Applications Engineer at 408 434 1000 For information on your system options or to purchase additional options or site licenses contact your...

Page 15: ...Safety Precautions Machine Safety Labels Objective Anti Crash Protection Light Source Safety Isopropyl Alcohol Safety Mercury Safety Machine Ergonomic Features 2...

Page 16: ...a general description for each label Table 2 1 Caution and Warning Symbols 1 of 2 Symbol Type of Warning Description Operation warnings and cautions Alerts you to important operating and maintenance...

Page 17: ...you to a potential ultraviolet radiation hazard Never remove a lamphouse or disconnect fiber optics while a lamp is on Never stare directly into the beam path of any system light source Safety Label...

Page 18: ...ource safety labels located on the front and top of the unit are shown in Figures 2 2 and 2 3 Figure 2 2 Halogen Transmitted Light Source Safety Label Top 1 1 Alerts you to a potential pinch point in...

Page 19: ...su Hg Xe Power Supply Safety Label 1 2 1 Alerts you to a potential infrared radiation hazard Never remove a lamphouse or disconnect fiber optics while the lamp is on Never stare directly into the beam...

Page 20: ...ght source power supplies are turned off before attempting to replace the lamp 2 Make sure light source power supplies are turned off before attempting to replace the lamp Never turn on the power if t...

Page 21: ...e beam path of any system light source 2 Alerts you to the potential hazard of ultraviolet radiation Never remove the lamphouse or disconnect fiber optics while the lamp is turned on Do not stare dire...

Page 22: ...erous voltages inside the tower which pose the risk of electrical shock 3 This receptacle is for use with system options only 4 This receptacle is for use with the system monitor only 5 These receptac...

Page 23: ...ck guard safety label is shown in Figure 2 13 Figure 2 13 Transparent Electrical Shock Guard Safety Label 1 1 Alerts you to the presence of a protective conductor terminal protective earth ground 1 Al...

Page 24: ...X magnification objective to focus on the highest upmost feature of the image 3 With the image in focus note the Z axis scale reading in microns 4 Use the key to drive the objective 100 microns closer...

Page 25: ...Use a hex wrench to remove the KLH 1 lamphouse from its lamp stand This will prevent unnecessary access and IR UV exposure 3 Use a wrench to remove the fiber optic attached to the optical adapter on t...

Page 26: ...cess and IR UV exposure 3 Never stare into the light source Halogen Lamphouse Use a hex wrench to remove the HMX 2 halogen lamphouse from the EPI illuminator This feature helps prevent unnecessary acc...

Page 27: ...n or contact with material may irritate or burn skin and eyes Fire will produce irritating corrosive and or toxic gases Vapors may cause dizziness or suffocation Runoff from fire control or dilution w...

Page 28: ...downwind evacuation for at least 300 meters 1000 feet If a tank rail car or tank truck is involved in a fire isolate for 800 meters 1 2 mile in all directions Also consider initial evacuation for 800...

Page 29: ...rial and transfer to containers Use clean non sparking tools to collect absorbed material Large spills Dike far ahead of liquid spill for later disposal Water spray may reduce vapor but may not preven...

Page 30: ...ent are shown in Table 2 5 This information comes from The Department of Transportation Guide 172 Table 2 5 Emergency Response Procedures for Mercury Related Accidents Part 1 of 2 Type Emergency Respo...

Page 31: ...with plastic sheet to minimize spreading or contact with rain For mercury use a mercury spill kit Mercury spill areas may be subsequently treated with a calcium sulphide calcium sulfide or sodium thi...

Page 32: ...25 Monitor arm rotates laterally across an 1800 range Monitor tilts up or down across a 170 range Monitor swivels laterally across a 1000 range 17 display 0 22mm dot pitch Low ELF and VLF emission for...

Page 33: ...System Overview Product Overview Subsystem Overview Functional Overview 3...

Page 34: ...S 310 400 system is a completely automated measuring system It consists of measurement electronics a confocal optics module and a computer controlled programmable 8 x 8 stage with automatic Piezo cont...

Page 35: ...method allowing adjustment of the camera s shutter and gain in addition to analog gain gain and offset micro lens over each pixel to increase the camera s fill factor Matrox frame grabber card and ca...

Page 36: ...ubsystem mechanical subsystem Electronic Measurement Subsystem The electronic measurement subsystem Figure 3 2 consists of an electronics control unit a power control panel computer system and control...

Page 37: ...control assembly camera control unit video frame grabber card KMS 310 400 control card local area network LAN card standard or model 400 cooling assemblies Figure 3 3 Electronics Control Unit 1 The s...

Page 38: ...Panel The power control panel is located in the front of the electronics cabinet Figure 3 4 Functions for each of the control panel components are listed in Table 3 1 Figure 3 4 Power Control Panel 1...

Page 39: ...puter includes 80486 motherboard 800 MB 2 0 GB hard drive 8 MB random access memory RAM one 3 5 1 44 MB floppy disk drive 16K internal cache memory external 256K high speed SRAM cache memory expandabl...

Page 40: ...d measurement Only alphanumeric entries cannot be made with the keypad It consists of 11 dedicated keys a single 2 axis joystick and rotary thumbwheel The KMS 310 400 system also has a drawer mounted...

Page 41: ...display subsystem Figure 3 6 consists of a confocal optics module a charged coupled device CCD camera and frame grabber microscope optics illumination hardware Figure 3 6 Optical Display Subsystem 1 2...

Page 42: ...ndard binocular eyepieces and a third optional port for the CCD camera To look through the binoculars rotate the head assembly to bring the oculars to the front of the system When you rotate the head...

Page 43: ...ular viewing port of the microscope Figure 3 8 The CCD camera captures images for measurement at the rate of approximately 300 000 pixels or picture elements in 1 30 of a second Each of these pixels i...

Page 44: ...ted to the CCD camera and 20 percent to the eyepieces A motorized five place turret or nosepiece holds and rotates the microscope objectives If you normally use only one thickness of substrate a colum...

Page 45: ...through the confocal microscope The KMS 310 400 uses one of three different lamps xenon mercury or metal halide Figure 3 10 All of these lamps come with an associated power supply The xenon and mercur...

Page 46: ...lash lead screws over the entire travel range Travel range for reflected systems is 8 in and 6 5 in for reflected transmitted systems Optical limit switches detect when the stage is at the end of the...

Page 47: ...ion is also monitored by a rotary encoder attached directly to the motor Once the system is initialized the Z axis will return to a preset rear focus position Antivibration Table Due to the extremely...

Page 48: ...field The camera signal is coupled directly to the camera control unit The signal is then sent to a digitizer and to the frame grabber The resolution of the video capture and subsequent signal handli...

Page 49: ...n error caused by the optics This value is used to adjust the measurement to the correct result The nominal calibration applies only to the type of substrate used during calibration such as a binary c...

Page 50: ...pecified such as edge number edge detection percentage axis and direction of scan Measurement Threshold The measured edge is determined from the edge found in the detection threshold calculation The m...

Page 51: ...User Interface Overview Software Controls Software Organization 4...

Page 52: ...Process engineers use the supervisor mode menus to calibrate the system set up measurement programs and set up other important software parameters as well as perform standard measurement tasks L Note...

Page 53: ...KMS 310 400 Supervisor s Manual 4 3 Figure 4 1 Key Software Elements 1 2 3 4 5 6 7 1 2 3 4 5 6 7...

Page 54: ...ure 4 2 is the primary control device used to operate the KMS 310 400 system It contains 11 keys a joystick for control of the stage s X and Y axis and a thumbwheel for fine focus You can control all...

Page 55: ...m For this reason once the objective reaches the detent spring position there may be a slight delay before a second change of objectives will be accepted 3 Select key This key operates in conjunction...

Page 56: ...icrons on the KMS 310R 400R systems Once the maximum of 15 microns is exceeded the thumbwheel activates column focus 8 Joystick If the stage was initialized at the opening screen the joystick can be u...

Page 57: ...SCAPE Menu F4 Arrow keys Arrow keys Turrent CCW low mag N either capital or small letter Turret CW high mag P either capital or small letter Hot Keys Many commonly used KMS 310 400 system commands can...

Page 58: ...n on and off CTRL T Toggle measure threshold between a fixed value of 50 and track detection threshold Caution the track detection threshold seeting will affect calibration CTRL W Report pixel locatio...

Page 59: ...this command during measurement will disrupt the measurement cycle F4 Toggle between Silent 0 and Debug 1 mode Table 4 5 Title Standby or Master Menu Screen Hot Keys Hot Keys Title Standby or Master M...

Page 60: ...nts in Figure 4 3 are discussed in greater detail in subsequent sections of this chapter Figure 4 3 KMS 310 400 Software Map Standby Screen Supervisor Master Menu Measure screen Data Map screen ID Ent...

Page 61: ...plays the Standby screen Figure 4 4 when the system is first turned on or when idle This is the entry screen for both supervisor and production mode To display the Supervisor Master Menu screen from t...

Page 62: ...Master Menu The Supervisor Master Menu screen Figure 4 5 is used to enter all submenus in production mode Supervisor Master Menu screen menu selections along with their uses are listed in Table 4 6 F...

Page 63: ...Map Select this menu item to display the Data Map window Program Setup Select this menu item to display the Program Setup window Sequence Setup Select this menu item to display the Sequence Setup wind...

Page 64: ...rm measurement functions Uses for each of the Measure screen icons are listed in Table 4 7 To display the Measure screen 1 From the Supervisor Master Menu Screen highlight the Measure icon 2 Press SEL...

Page 65: ...ion in either window Size windows Press SELECT to set the size of the left right or both windows Position windows Press SELECT to set the position of both left and right windows either together or sep...

Page 66: ...a automatically collected with each measurement is displayed in the Statistics window Figure 4 7 Uses for each of the Statistics window buttons are listed in Table 4 8 To display the Statistics window...

Page 67: ...us measurement sequences if you make multiple measurements with a script Clear Zero the values of all readings taken Discard Remove only the last reading taken from the statistics calculations Print P...

Page 68: ...tion tracking purposes information regarding the device you are measuring or other device identification data Uses for each of the ID Entry screen buttons are listed in Table 4 9 To display the ID Inf...

Page 69: ...nter the name of the substrate Process Type Enter the name of the process type Production Run Enter production run information Device Type Enter information about the device type Print ID Screen Print...

Page 70: ...n an existing program for modification copy an existing program or delete an existing program Uses for each of the Select Program buttons are listed in Table 4 10 To display the Select Program window...

Page 71: ...u to select a program to delete Create Display the Destination Program dialog box to set the destination program Page up page down Move to the next or previous page Use Toggle the Sort By Use selectio...

Page 72: ...idual values within the display Uses for each of the Data Map screen selections are listed in Table 4 11 The data map function is available with KMS systems only and can only be used once X Y matrix f...

Page 73: ...item is selected the selection box adjacent to the item turns from white to black Print Print map data to file When you select PRINT the Log dialog box is displayed prompting you to select the type o...

Page 74: ...turns from white to black Selecting the correct program to operate is very important The system will always return to the last program used even after power has been turned off L Tip Remember that ea...

Page 75: ...ID at every measurement Toggle on and off the force part ID at every measurement selection Illumination info in Save Recall windows Toggle on and off the illumination information selection in the Sav...

Page 76: ...ividual values within the display or change the method of measurement When an item is selected the selection box adjacent to the item turns from white to black Uses for each of the buttons in the Sequ...

Page 77: ...ement Sequence Setup dialog box and set up the default measurement c Auto recall Toggle on or off the Auto Recall selection c Exit Return to the Supervisor Master Menu window Measurement Width Offset...

Page 78: ...the production mode Measure screen and be unavailable for use by operators When an item is selected in the Operator Lockouts window the selection box adjacent to the item turns from white to black Us...

Page 79: ...or enable operator access to this function Save 123 Toggle the Save 123 selection on and off to block or enable operator access to this function Recall 123 Toggle the Recall 123 selection on and off...

Page 80: ...h objective must be calibrated for both of these microscopes Uses for each button in the Calibrate window are listed in Table 4 15 L Note You will need to create a seperate program and calibration fil...

Page 81: ...ons as the unit of measurement for calibration Objective Select and set objective magnification Aperture Select and set aperture to be used for measuring Standard Horizontal Enter the horizontal pitch...

Page 82: ...d assign objective positions on the turret Uses for each button in the System Setup window are listed in Table 4 16 When an item is selected the selection box adjacent to the item turns from white to...

Page 83: ...rn to the System Setup window Entry Code Select ENTRY CODE to display the Change Access Code subwindow You can enter a new code save it and select EXIT to return to the System Setup window Note check...

Page 84: ...he Supervisor Master Menu screen highlight the Save Program icon 2 Press SELECT Figure 4 16 Save Program Menu Window Button selections in the Save Program window are shown in Table 4 17 Table 4 17 Sav...

Page 85: ...xit to DOS window 1 From the Supervisor Master Menu screen highlight the Exit to DOS icon 2 Press SELECT Figure 4 17 Exit to DOS Window Button selections in the Exit to DOS window are shown in Table 4...

Page 86: ...andby Screen icon 2 Press SELECT 3 Select EXIT to exit the Supervisor Master Menu screen and return to the Standby screen Figure 4 18 Return to Standby Selection Button selections in the Standby Scree...

Page 87: ...System Setup Overview Configure Illumination Settings Define Calibration Parameters Define System Options Set Objective Parfocality and Parcentricity Adjust Autofocus Parameters 5...

Page 88: ...h provides procedures for setting up the transmitted condenser and illumination adjusting illumination controls as well as adjusting coarse and Piezo fine focus settings Define Calibration Parameters...

Page 89: ...w Set map colors Change your supervisor code Change turret objective assignments Define system options Select calibration parameters Calibrate the microscope Calibrate horizontal settings Calibrate ve...

Page 90: ...es or Method 2 Set up the transmitted condensor using the CONDENSR SCR script Method 1 Visually Set Up the Transmitted Condensor with the Ocular Eyepieces To set up the transmitted condensor using the...

Page 91: ...d while viewing in the oculars Image of aperture is out of focus Aperture completely closed while viewing in the oculars Image of aperture is in focus 7 While viewing the aperture in the oculars turn...

Page 92: ...the Transmitted Condensor Using the CONDENSR SCR Script To set up the transmitted condenser using the CONDENSR SCR script 1 Place the photomask on the stage with the chrome side up 2 Focus the system...

Page 93: ...N V10 V11 V12 V13 METER V20 TEXT 100 100 2 INTENSITY V20 PAUSE 1 MATH V31 V30 0 LOOP V31 REPEAT EXIT 7 Move to a clear area on the mask focus on an object and move the chrome edge to the edge of the o...

Page 94: ...2 Position a feature into the center of the measurement screen 3 From the Measure Screen select the Window icon and adjust the measurement window so that it falls across the feature on the screen 4 Hi...

Page 95: ...Table 5 1 Table 5 1 Illumination Ranges Objective Illumination Gain Offset Analog Gain Camera Gain Camera Shutter 10X 30 35 31 35 47 56 1 5 7 5 6 50X 45 55 31 35 47 56 1 10 15 6 7 100X 50 75 31 35 47...

Page 96: ...lect the Select Program button b Select Copy and press ENTER c Select the program to be copied type in the number of the new program and press ENTER Adjust Illumination Controls If the system illumina...

Page 97: ...f the image intensity profile is not flattened saturated 4 Press SELECT until XX OFFSET is displayed 5 Use the and arrow keys to set the lower portion of the vertical rectangle so that it is white doe...

Page 98: ...mplished with a servo motor driven column that uses a 0 1 micron linear scale for positioning repeatability If the object cannot be focused within 5 microns of the Piezo 0 00 position you must adjust...

Page 99: ...trate rotate the keypad thumbwheel in the down direction Re center Piezo Fine Focus To re center the Piezo fine focus 1 From the Measure Screen highlight the icon and press MENU The Column Autofocus s...

Page 100: ...uses that objective This will save time and ensure program repeatability Once the system is calibrated you should not need to recalibrate it unless total magnification to the camera is affected or if...

Page 101: ...standard 3 Press ESC to return to the Calibration screen 4 To select your choice of measurement units as microns or micro inches highlight the Select to Toggle Units field and press SELECT one or mor...

Page 102: ...to calibrate to 3 In the Standard Horizontal section of the Calibrate screen highlight the Line field and press SELECT 4 Enter the line dimension value 5 Press SELECT or ESC to set the line Calibrate...

Page 103: ...nt calibration 1 With the Measure screen displayed press ALT O 2 View the comment line L Note If SUBM is not displayed in the comment line then this option is not installed and you can skip the rest o...

Page 104: ...up the measurement window with the Roger K Sherman RKS line width standard mask a Center the L line of Target 1 in the middle of the screen along both the X and Y axes b Adjust the measurement window...

Page 105: ...al line of target 5D on the Y axis b Adjust the measurement windows so that they are no higher or lower than the fiducial mark on the right side of the pitch Figures 5 12 and 5 13 c Press the Recall b...

Page 106: ...side of the pitch Figures 5 14 and 5 15 c Press the Recall button to save this window in Recall 1 Figure 5 14 NIST SRM 475 Standard Target 5D Pitch Figure 5 15 NIST SRM 475 Standard Target 5D Line 4...

Page 107: ...the Measure window as shown in Figure 5 16 Make sure that the correct edges are for pitch Figure 5 16 Measure Window Movement Line Pitch 4 Set the scan direction for measurement using the standards l...

Page 108: ...e the standard 90o so that the line and pitch are measured in the Y axis From the Measure screen go to the icon and press SELECT Set up the measurement windows as described in Steps 5 6 and 7 Follow t...

Page 109: ...procedures for changing system colors your access code turret objective assignments Display the System Setup Window To display the System Setup window 1 From the Supervisor Master Menu screen highligh...

Page 110: ...e The selected color is displayed on the right 3 To select the new color you want to assign to the palette highlight the Red Green or Blue button press SELECT and use the arrow keys adjacent to the hi...

Page 111: ...any combination of uppercase and lowercase letters 3 To save the new code and return to the System Setup screen select Save and press SELECT 4 To return to the System Setup screen without saving the n...

Page 112: ...e in the new magnification value and press SELECT to set the new value b Press ESC to undo the change in value c Repeat the previous steps for each turret position to be changed 3 To save the new conf...

Page 113: ...nation is properly set This procedure assumes that the stage is level To set the parfocality and parcentricity objectives 1 Place a mask on the mask holder 2 Rotate the turret to the 10X objective usi...

Page 114: ...7 Set the lower Z limit for the 50X objective a Select Set Z Limit b Use the arrow keys to adjust the Z column c Place the Z column at a lower limit of no more than approximately 100 microns past focu...

Page 115: ...e expected focus position The range default is set to 20 with a step size of 1 micron The default focus window for determining the focus is 200 pixels wide by 60 pixels high window and is in the cente...

Page 116: ...us reading every step in nanometers The direction of the move minimizes the effects of backlash L Note Range and step can be changed with the script command FF_SET FF_SET 20000 100 or manually with th...

Page 117: ...p1 To do this take a focus reading approximately every 110 nanometers if you are using a 30 micron Piezo Use Table 5 3 and the following definitions to complete the first pass p1 Start initial positio...

Page 118: ...specified step Use Table 5 3 and the following definitions to complete the first pass p2 Swing initial position at start of the autofocus procedure Step user specified parameter p2 best focus position...

Page 119: ...Creating Automated Scripts Overview Script Creation Script Locator Script Commands 6...

Page 120: ...the DOS editor EDIT EXE or another suitable editor However word processing programs are not considered suitable Script files consist of a series of commands all in uppercase and various parameters For...

Page 121: ...UMP Vxx label LOOP Vxx label CALL Vxx label Where Vxx is either a variable or a number If the first parameter is 0 or false the statement is skipped If it is a nonzero the command is executed and cont...

Page 122: ...Meaning plus minus multiply equals divide not or less than greater than SIN sine COS cosine SQRT squareroot and The conditional operators the value assigned to Vxx is the result of the conditional 0...

Page 123: ...ile Output In addition to logfile output you can output to a matrix file Matrix files are rectangular arrays of numbers integers in a NxM grid The matrix file can be any dimension When you save the da...

Page 124: ...tate their logfile with pertinent data for the measurement run GETVAR takes two parameters The first parameter is the variable to store the results in and the second parameter is a string to prompt th...

Page 125: ...g pattern recognition 1 Set up the window or region of interest where you expect to find the edges The command to set up the window is RP_WIN and it takes four parameters in pixels on the screen top l...

Page 126: ...ows There are two windows per sequence setup 0 and 1 which correspond with the left and right or top and bottom in vertical measurements After defining the sequence windows you can define the edges to...

Page 127: ...S takes one parameter and sets which statistics register the results will be accumulated in The default is 0 unless set under script control After setting MSR_DEFAULT and MSR_STATS you can execute the...

Page 128: ...ers 1 An unused variable number V00 V99 to act as a matrix file handle It is important not to use this variable for any other purpose until you close the matrix file In general count this variable as...

Page 129: ...DING FEATURE COORDINATES MARK NANO5 MATRIXOPEN V00 5 100 MTX T313SITE MTX CALL 1 SITESCAN MATRIXCLOSE V00 JUMP 1 EXITMARK SUBROUTINE FOR MOVE FROM ONE SITE TO ANOTHER MAKE V01 AS THE CURRENT ROW IN TH...

Page 130: ...ocated and eventually if enough matrixes are orphaned the system will run out of memory for script usage Orphaned matrix problems are very difficult to diagnose In the first block of sample code below...

Page 131: ...is similar to the MATRIXVALUE command except it outputs the variable into the matrix location instead of reading it into a variable Keep in mind that at this point it is not saved to the disk yet To s...

Page 132: ...a pattern recognition routine that can assist in centering the part Locate Feature Edges Use pattern recognition to find the top bottom left and right edges of the feature First calculate the centroid...

Page 133: ...a PLANEPT 1 2 after each of the origin deskew commands then have a GOSTOP set to a point approximately 60 degrees from each of them This will be PLANEPT 3 Once you execute PLANECALC the plane of the s...

Page 134: ...ng Several measurements can be executed per site In this case the data can be arranged by column in the logfile Suggested Order of Script Sequence The suggested order for script subroutines is as foll...

Page 135: ...noted as part of the script Figure 6 1 Measurement Scenario for Example Script Example Script THIS IS AN OUTLINE FOR A BASIC SCRIPT THAT WILL MEASURE THE UPPER ELEMENT AND THE RIGHT HAND ELEMENT OF A...

Page 136: ...NU V99 TURN PRINTER ON YES NO MATH V98 V99 1 PRINTER V98 MENU V99 TURN STATISTICS ON YES NO MATH V97 V99 1 STATS V97 STATS C ALIGNS MASK TO USER DEFINED ORIGIN DESKEW AND PLANARIZATION POINTS USER MUS...

Page 137: ...ENCE WINDOWS 3UM BEYOND EDGES OF FEATURE CENTERS FEAURE BASED ON 2UM STAGE ACCURACY MARK ALLOWS FOR MULTIPLE CALL s OF THIS ROUTINE MARK CENTER CENTERING ROUTINE RP_WIN 140 60 500 420 BOX 140 60 500 4...

Page 138: ...T X Y COORDINATES TO SEQWIN COORD VARIALBLES SEQNAME 1 RIGHT Y MATH V531 V431 MATH V532 V432 MATH V533 V433 MATH V534 V434 MARK MEASURE SETS SEQUENCE WINDOWS AS PER THE CHOSEN PATTERN RECOGNITION ROUT...

Page 139: ...ASUREMENT AND STATISTICS MARK PRINT_EA_X PRINT X Measurement V530 RETURN MARK PRINT_EA_Y PRINT Y Measurement V540 RETURN MARK PRINTX PRINTSTR X Axis Avg Max Min 3 StDev n V531 V532 V533 V535 V534 PRIN...

Page 140: ...Name Function Page Number AF_EXEC Execute autofocus 6 48 AF_SET Set up range swing and step in PIEZO units 6 48 AF_STAT Turn Autofocus on or off 1 0 Turn AF on or off measurement 6 48 ALIGN Set curren...

Page 141: ...cus will reset piezo to center of stack 6 57 GETMOTCNTS Get the motor position not scales in um 6 57 GETPOS Get stg position in 1 0 um resolution 6 57 GETPOS_NM Get stg position in 0 1 um resolution 6...

Page 142: ...the OPERATOR out of ESCAPEing from script processing 6 66 LOGMEASURE Turns the measure logging on and off 6 66 LOOP Loop back to MARKER 6 66 LUMAUTO Adjusts system illumination to approximate LUMMARK...

Page 143: ...t default opened name 6 75 MEASURE Involves measurement of feature 6 76 MEASUREALGORIT HM Allows switching between standard measure focus algorithm and average min max algorithm 6 76 MENU Allows pop u...

Page 144: ...model 6 83 PATREC_GET Retrieve results pattern match 6 84 PATREC_SAVE Save image of feature for PATREC_FIND command use 6 85 PATREC_SHOW Show a saved image 6 85 PAUSE Pause script execution for Vsecon...

Page 145: ...t window x y pixels 6 89 RECPT Defines edge to be located in pattern recognition routine 6 90 RELMOVE Move stage a relative x y distance from current position in 1 0 um resolution 6 90 RELMOVE_NM Move...

Page 146: ...tem in 1 microns 6 95 SHOWPIC Load saved image to display screen 6 95 SILENT Toggles on and off if the interpreted commands will be echoed to screen 6 95 SITENAME Set the measure site name to name 6 9...

Page 147: ...List of Commands Part 8 of 8 Script Name Function Page Number UPDATE Update the realtime display 6 99 XHAIR Draw cross in center of screen 6 100 Z_MOVE PIEZO move to Z axis position in nanometers 6 1...

Page 148: ...tegory Page Number COMMENT Text to end of line Text comment not executed 6 50 Text to end of line Equivalent to COMMENT 6 50 COMMENT Vnum Strip comments to reduce file size 6 50 Vnum If Vnum strip com...

Page 149: ...flag for sequence Vseq 0 none 1 2 3 4 user abort 6 81 MSR_STATS Set collector for gathering of standard measurement statistics max 10 6 81 RECALL Vnumber Vx Vy Recall setup from program 0 10 optional...

Page 150: ...94 SEQOUTPUT Select measurement output type mean maximum minimum 6 94 Image Function Commands These commands are used to save an image into a file and to show the image on screen Table 6 6 Image Func...

Page 151: ...tioning and Turret Command This command allows the user to rotate the turret to a designated position units 0 5 The command is the programmed equivalent of the KMS 300 keypad turret increment and decr...

Page 152: ...ition of measure window 6 59 LUMAUTO Adjusts system illumination to approximate LUMMARK values 6 67 LUMAVG Averages the number of frames as setup in the program for image analysis 6 67 LUMDUMP Dump il...

Page 153: ...numZ 0 001 mm units 6 60 Z_MOVE V_z Move to position z 0 001 mm units 6 100 Z_REL V_z Move relative distance z 0 001 mm units 6 100 Z Axis Position Commands Column Motor These commands allow the user...

Page 154: ...stopnum V_x V_y Valigned Get stop in Vx Vy in aligned coordinate system in 1 microns 6 58 GO_ORIGIN Move stage to ORIGIN 6 60 GOSTOP Vstopnum Go to preprogrammed position 0 99 6 60 MASK_ORIGIN Set mas...

Page 155: ...lative in planar polar space Z compensation with 0 1 um resolution 6 91 SETSTOP Vstopnum V_x V_y Set stop to V_x V_y in coordinate system in 1 microns 6 95 Non aligned Stage Movement Commands These co...

Page 156: ...stics in subpixel values 6 96 Planarization Commands These commands define the slope of the stage and wafer Three points define a plane so the stage is positioned to three locations at far corners of...

Page 157: ...o capture on off 6 61 GSPAWN Command parameters SPAWN in graphics mode faster spawn 6 61 IDINFO O P L Tn string ID screen Operator O Print P Logfile name L sets logfile name to text string Text Tn set...

Page 158: ...to operator until ESC key is pressed 6 81 PAUSE Vseconds Pause for V seconds for inspection or other reason 6 86 SPAWN Command parameters Suspends KMS 300 operating system executes a DOS command with...

Page 159: ...able 6 17 Data Output Matrix Commands Script Name Functional Category Page Number MATRIXCLEAR Clears all matrix files that are in the memory 6 72 MATRIXCLOSE Nnumhandle Close MATRIX frees memory 6 72...

Page 160: ...PAWN Execute DOS command with parameter while in graphics mode 6 61 IDINFO Manipulate input to log file 6 63 LOGMEASURE Turns the measure logging on and off 6 66 PRINT Text string Print text string to...

Page 161: ...ll not load past END 6 55 EXIT MARKER Set MARKER here for call jump loop Set operator MARKER here operator may jump script processing 6 55 INCLUDE Inserts a script segment from an existing file 6 62 J...

Page 162: ...erage light intensity for RP_WIN 6 77 RECPT Vpt Vaxis Vdir Dedge Vth Set a point to search for 6 90 RP_DISPLAY Show intensity plots from RP_WIN 6 92 RP_EXEC Vstartpt Vpt_count Execute search using Vst...

Page 163: ...ocus quality is based on the derivative of the edge selected Table 6 22 Autofocus Commands Script Name Functional Category Page Number AF_EXEC Perform autofocus 6 48 AF_SET Vrange Vswing Vstep Set up...

Page 164: ...focal plane is within one half the specified range from the current Piezo position The focus will require time to complete range step 1 15 second a small step size and large range can result in a very...

Page 165: ...set before this function can be safely used To set the Z positive limit proceed as follows 1 Manually focus upon the highest feature of the specimen using the highest installed magnification objective...

Page 166: ...rameters EXAMPLE SCRIPT AF_SET 1024 256 16 AF_EXEC RELATED PROCEDURES AF_SET SEQWIN AFSTAT AF_SET FUNCTION Vrange Vswing Vstep Sets the Range Swing and Step for the AF_EXEC command USE Sets the Range...

Page 167: ...creen with Vx1 Vy1 as the top left and Vx2 Vy2 as the bottom right corner color Vcolor and optionally filled or not OPTIONS If Vfilled is 1 then the box will be a solid color EXAMPLE SCRIPT BOX 100 10...

Page 168: ...ing it to the logfile OPTIONS P print to logfile D copy date information to variables mo day year T copy time information to variables hr min sec EXAMPLE SCRIPT CLOCK T V20 V21 V22 RELATED SCRIPTS PRI...

Page 169: ...ely EXAMPLE SCRIPT DEBUG 1 RELATED SCRIPTS SILENT DESKEW FUNCTION DESKEW Calculate the skew angle for the mask vs stage USE The DESKEW point is the second of two alignment points defining the misplace...

Page 170: ...en executes the script command MEASURE 1 storing the x y screen coordinates of the two edges into a matrix whose handle is Vhndl The matrix y dimension is returned in variable Vlines where the x dimen...

Page 171: ...es into a matrix whose handle is Vhndl The matrix y dimension is returned in variable Vlines where the y dimension is fixed at 4 This command assumes horizontal or vertical edges and parallel The edge...

Page 172: ...V2max variable for maximum X Y nanometers edge 2 V2stddev variable for standard deviation nm x 1000 edge 2 USE Opens a matrix of N lines by 4 columns to matrix handle Vhndl Minimum and maximum positio...

Page 173: ...CRIPT ERASE RELATED SCRIPTS BOX LINE XHAIR UPDATE EXIT FUNCTION EXIT USE End script execution and reset to start of script EXAMPLE SCRIPT EXIT RELATED SCRIPTS QUIT END FASTSURF FUNCTION FASTSURF Vnano...

Page 174: ...IN FF_WIN FUNCTION FF_WIN Vx1 Vy1 Vx2 Vy2 USE Sets the region of interest for focus commands The focus commands will use this window in conjunction with the FF_SET parameters to find the best focus EX...

Page 175: ...rf else find edge USE One pass through the range every step nanometers to determine the best focus position EXAMPLE SCRIPT FOCUSIMG 1 0 RELATED SCRIPTS FOCUSFAST FINDSURF FOCUSIMG FF_SET FF_WIN GETMOT...

Page 176: ...T PRINTSTR GETVAR FUNCTION GETVAR Obtain numerical value from operator GETVAR Vnum Prompt message USE A prompt and an entry window is displayed for the operator to enter a value The entered value is p...

Page 177: ...nd lowerright corners into the script variables Vx1 Vy1 Vx2 Vy2 The coordinates match the output from the manual operation CTRL W EXAMPLE SCRIPT Figure 6 6 is an example of display screen coordinates...

Page 178: ...VE Z_REL GET_Z FUNCTION GET_Z VnumZ units are 001 um Gets Piezo position in nm and stores it in the variable VnumZ USE Allows the script to be able to read the Piezo stack position Mostly useful for s...

Page 179: ...RABSTAT FUNCTION GRABSTAT Vnum 0 1 Toggles the acquisition of video images useful mainly for debugging the system USE Allows the frame grabber to be toggled off so that a static image can be overlaid...

Page 180: ...d for example you cannot use INCLUDE command in the included filename EXAMPLE SCRIPT MATH V11 V11 1 INCLUDE script1 scr CALL 1 GLOBAL JUMP 1 FINI INCLUDE script2 scr MARK FINI TURRET 1 EXIT is equival...

Page 181: ...N GLASS sets SUBSTRATE field IDINFO T3 SCRIPT TESTING sets PROCESS field IDINFO T4 05SEPT1995 sets PRODUCTION field IDINFO T5 KMS300 sets DEVICE field IDINFO L run102 log sets LOGFILE field NOTES on L...

Page 182: ...n the two defined points on the screen useful in debugging scripts to visualize which edges were found with the pattern recognition commands EXAMPLE SCRIPT LINE 100 100 100 300 8 RELATED SCRIPTS BOX X...

Page 183: ...gram EXAMPLE SCRIPT LOADPROG 004 RELATED SCRIPTS LOADCALIB LOADCF LOADSUBM LOADSUBM FUNCTION LOADSUBM load multi point calibration data file LOADSUBM file ext file ext Filename of multi point calibrat...

Page 184: ...he logging of measurement data to the logfile 0 disabled 1 enabled USE Allows script control of the log data to log file i e PRINTER command under measure menu in manual mode EXAMPLE SCRIPT LOGMEASURE...

Page 185: ...the averages is computed The final average illumination values in the measure window area are then written into the filename as a comma separated value file which can then be imported into a spreadsh...

Page 186: ...allow a script to auto meter the illumination values For the KMS 400 systems camera gain and shutter speed can be read into variables also EXAMPLE SCRIPT LUMREAD OV44 GV45 CV46 RELATED SCRIPTS LUMSET...

Page 187: ...h S Vscale Scale for DataMap PD Print display matrix values PS Print statistics PV Print video EXAMPLE SCRIPT MATRIXCLOSE V200 DATA CSV MAPMENU N DATACSV MASK_ORIGIN FUNCTION Set mask coordinates orig...

Page 188: ...be used with sacrifices in accuracy EXAMPLE SCRIPT The following example opens a matrix file defining the x y positions of three fiducials for a mask templates Mask coordinates MATRIXOPEN V10 6 4 FIDU...

Page 189: ...RK MATH FUNCTION MATH Vxx VxyOpVyy Where Op is SIN COS SQRT The Op value can be any one of the symbols shown in Table 6 26 Table 6 26 Op Values Symbol Meaning Plus Minus Multiply Equals Divide Not Or...

Page 190: ...d in order to regain access to the data in the files It is advised that this instruction be used only if the logic in the script becomes very complex and maintaining the matrix files becomes too diffi...

Page 191: ...MATRIXCLOSE V200 MATRIXOPEN FUNCTION MATRIXOPEN open and read matrix file MATRIXOPEN Vhndl dimx dimy file ext USE Open a matrix and read in dimx dimy values OPTIONS Vhndl Matrix handle assigned to mat...

Page 192: ...ell adress Vnum Value to be placed into matrix cell EXAMPLE SCRIPT MATH V01 1 MATRIXSET V80 2 V01 100 sets cell at row 1 col 2 to 100 MATRIXSET V80 2 V01 V01 sets cell at row 1 col 2 to 1 MATRIXVALUE...

Page 193: ...S Vhndl Matrix handle assigned to matrix maximum 20 file ext filename of matrix file maximum 10 characters NOTE Use MATRIXCLOSE to free the handle and memory EXAMPLE SCRIPT MATRIXOPEN V80 2 4 sample m...

Page 194: ...ndard method or the optional method for use with phase shift masks and resist coated masks The command when set for the optional method allows the user to define the maximum threshold and associated p...

Page 195: ...USE Places the average illumination of the area enclosed in the RP_WIN into the variable Vnum EXAMPLE SCRIPT MARK CHECK RP_WIN 302 215 340 245 METER V87 MATH V86 V87 600 MATH V85 V87 650 CALL V85 DECR...

Page 196: ...Z_MOVE GET_Z GET_MOT_Z MOVEPOL FUNCTION MOVEPOL V_x V_y USE Move to stage position V_x V_y in the aligned deskewed coordinate system EXAMPLE SCRIPT MARK SITESCAN MATH V01 0 MARK NEXTPOS MATH V01 V01 1...

Page 197: ...MATH V15 V02 0 JUMP V15 EXITSCAN MOVEPOL_NM V02 V03 PAUSE 2 CALL 1 POLELOCATION RELATED SCRIPTS MOVEPOLZ RELMOVE REL_POL REL_POLZ MOVEPOLZ FUNCTION MOVEPOLZ V_x V_y USE Move to stage position V_x V_y...

Page 198: ...TPOS MATH V01 V01 1 MATRIXVALUE V00 1 V01 V02 MATRIXVALUE V00 2 V01 V03 MATRIXVALUE V00 3 V01 V04 MATRIXVALUE V00 4 V01 V05 MATRIXVALUE V00 5 V01 V06 MATH V15 V02 0 JUMP V15 EXITSCAN MOVEPOLZ_NM V02 V...

Page 199: ...EPEATPOLE RELATED SCRIPTS MSR_STATS MEASURE MSR_DEFAULT MSR_STATS FUNCTION MSR_STATS Vnum USE Sets the data collection register for the measure command 0 9 All data will be placed in the register Vnum...

Page 200: ...on allows a handy way to test a subroutine without running the entire script EXAMPLE SCRIPT OPMARK TEST_POLE_MEASUREMENT RELATED SCRIPTS CALL JUMP LOOP ORIGIN FUNCTION ORIGIN USE Sets the local mask o...

Page 201: ...rs are specified the KMS software will search over the entire image area The search may be narrowed by specifying a rectangular area The center pixel of the rectangle is defined by its x and y locatio...

Page 202: ...s from the last PATREC_FIND A score of 100 would be a perfect match A score of 80 or higher would a typical score If no pattern is found then a zero score would be reported Also if a zero score is ret...

Page 203: ...st be TIF These three formats are the only ones supported at this time OPTIONS EXAMPLE SCRIPT MATH V01 1 sequence 1 RECALL V01 PATREC_SAVE MYMOD TIF Save in TIF format EXIT RELATED SCRIPTS PATREC_FIND...

Page 204: ...Vx2 Vy2 Filename USE Saves the video in the box defined by Vx1 Vy1 Vx2 Vy2 to filename as a BMP file EXAMPLE SCRIPT PICTURE 40 100 600 480 image bmp RELATED SCRIPTS PICSHOW PICTURETIFF PICTUREVGA PICT...

Page 205: ...s the three points needed for a plane calculation that allows Z axis adjustments when moving the stage USE Used by the software to calculate a plane where the substrate is in focus Allows freedom to m...

Page 206: ...PLE SCRIPT POSPOL 61232 36917 RELATED SCRIPTS POSMOVE_NM POSPOL POSPOL_NM POSPOL_NM FUNCTION POSPOL_NM V_x V_y USE Get mask position into V_x V_y in aligned nanometers 100 nanometer resolution EXAMPLE...

Page 207: ...M FUNCTION PROGNUM Vprognum USE Gets the currently loaded program allows script to be aware of program being used EXAMPLE SCRIPT PROGNUM V32 RELATED SCRIPTS LOADPROG LOADCF LOADCALIB QUIT FUNCTION QUI...

Page 208: ...ove stage by Vx Vy microns EXAMPLE SCRIPT RELMOVE 1 3 RELATED SCRIPTS POSMOVE POSPOL MOVEPOLZ REL_POL REL_POLZ RELMOVE_NM FUNCTION RELMOVE_NM Vx Vy USE Move stage by Vx Vy nanometers 100 nm resolution...

Page 209: ...y microns in the aligned or polar coordinate frame Z compensated EXAMPLE SCRIPT REL_POLZ 1 3 RELATED SCRIPTS POSMOVE POSPOL MOVEPOLZ REL_POL REL_POLZ REL_POLZ_NM FUNCTION REL_POLZ_NM Vx Vy USE Move st...

Page 210: ...MY DAT EXAMPLE SCRIPT RP_DISPLAY 1 RELATED SCRIPTS CALL JUMP LOOP RP_EXEC FUNCTION RP_EXEC Vstart Vnum USE Execute the setup pattern recognition starting with RECPT Vstart and the following Vcnt RECPT...

Page 211: ...r negative direction 1 for positive Vedge Edge number from neg pos side of window 1 100 Vth Threshold percentage for edge detection USE 50 threshold assumed unless overridden using Ctrl t EXAMPLE SCRI...

Page 212: ...0 2 0 mean 1 min 2 max USE Selects the measurement output type for a sequence OPTIONS EXAMPLE SCRIPT MATH V01 1 sequence 1 MATH V1200 5 SEQOUTPUT V01 1 minimum output RECALL V01 MEASURE V1200 EXIT RE...

Page 213: ...D SCRIPTS PICTURE PICTUREVGA PICTURETIFF SILENT FUNCTION SILENT 0 1 USE Toggles silent script operation speeds script processing by 1 3 EXAMPLE SCRIPT SILENT 1 RELATED SCRIPTS COMMENT 11 11 1 DEBUG SI...

Page 214: ...T RELATED SCRIPTS END EXIT QUIT STATEDGE FUNCTION STATEDGE Vedge 0 1 Vmax Vmin Vavg Vcnt Vsdev USE Measure edge statistics STATMSR FUNCTION STATEDGE Vreg 1 10 Vmax Vmin Vavg Vcnt Vsdev USE Get statist...

Page 215: ...the statistics for the specified collector Returns maximum measurement minimum measurement average measurement number of measurements and a 3 sigma value for standard deviation The lsd of the standard...

Page 216: ...rs 0 Off 1 On RELATED SCRIPTS MSR_STATS STATMSR TEXT FUNCTION TEXT Vx Vy Vcolor String USE Displays the string at the Vx Vy position of the screen with the color Vcolor EXAMPLE SCRIPT TEXT 100 100 2 R...

Page 217: ...nabled or disabled in the Program Setup screen of the KMS program and its status is maintained as a global in the SYSTEM CFG file OPTIONS EXAMPLE SCRIPT TURRETFF 1 Enable fast focus TURRET 2 MESSAGE F...

Page 218: ...EXAMPLE SCRIPT XHAIR 1 RELATED SCRIPTS LINE BOX Z_MOVE FUNCTION Z_MOVE Vz USE Moves the piezo to Vz in nanometers EXAMPLE SCRIPT Z_MOVE 13000 RELATED SCRIPTS Z_REL MOT_Z_MOVE MOT_Z_REL Z_REL FUNCTION...

Page 219: ...Operation Overview Access and Exit the Supervisor s Menu Set up a Program Measure Manage Measurement Data 7...

Page 220: ...pter section Access and Exit the Supervisor Master Menu Screen which provides procedures for accessing the Supervisor Master Menu screen returning to the Standby screen and exiting to DOS Setup a Prog...

Page 221: ...tics optional Measure in manual mode Measure in semi auto mode Measure in auto mode Measure Access the Supervisor master Menu screen Return to the Standby screen Exit to DOS Access the Supervisor Mast...

Page 222: ...een In idle mode the KMS 310 400 system displays the Standby screen Figure 7 2 When the system is first turned on Production is highlighted as the default selection Both production and supervisor soft...

Page 223: ...te Only qualified personnel can enter the Supervisor Mode because any changes made in this mode are permanent and control the Production Mode of operation for each program For this reason an access co...

Page 224: ...n displayed Figure 7 4 Figure 7 4 Supervisor Master Menu Screen Return to Standby Screen To return to the Standby screen 1 From the Master Menu screen select Standby Screen The Return to Standby Scree...

Page 225: ...nges select Exit Exit to DOS To exit the Supervisor Master Menu screen and exit to DOS 1 From the Master Menu screen select Exit to DOS The Exit to DOS subwindow is displayed below the Current Program...

Page 226: ...am defining program parameters setting operator lockouts configuring sequence setup setting up measurement window functions selecting measurement options setting up the measurement axis Creating progr...

Page 227: ...ram The Program Menu window Figure 7 7 is displayed listing the programs in the order they were previously used from top to bottom 2 To sort programs by previous usage or program number select SORT BY...

Page 228: ...subwindow Figure 7 8 Figure 7 8 Source File Subwindow The Select From List button is highlighted 4 Press SELECT to open an existing file from the list 5 Highlight the Enter File Number button and pre...

Page 229: ...isting program 1 From the Select Program screen highlight Copy and press SELECT 2 Highlight the number of the program you want to copy and press SELECT 3 Enter a new program name for the copy you made...

Page 230: ...Master Menu window Delete a Program Caution Use Delete carefully If you select a program number after highlighting Delete the program with its calibration and stage stops will be lost Although it is...

Page 231: ...program name should identify the substrate to be measured or the purpose of the program For example since this will be a reference program for both setup and calibration information use a name such a...

Page 232: ...10 To type in the number of frames you wish to be averaged limit 32 toggle on that selection The default value is 16 11 To return to the Supervisor Master Menu select Exit Set Operator Lockouts This o...

Page 233: ...lockout options select the item to lock out and toggle on Repeat the previous step for each item you wish to lock out L Note When the Measure screen is entered while in production mode any icon or but...

Page 234: ...ure 7 14 This screen lists the window setups that must be saved using the Save Recall icon in the Measure screen during program setup Figure 7 14 Measurement Sequence Setup Window 2 Highlight the save...

Page 235: ...the reading is incorrect based on the value entered in the Limits field 8 To return to the Measurement Sequence Setup screen to change information for another program press EXIT 9 To turn auto recall...

Page 236: ...Set window edges Save window configuration Adjust Window Control Four icons on the Measure screen control the setup of measurement functions of the windows Position Size Threshold Edge There are two m...

Page 237: ...ervisor s Manual 7 19 To adjust window control 1 From the Supervisor Master Menu screen select Measure The Measure window is displayed Figure 7 16 Figure 7 16 Measure Screen 2 Press SELECT when the or...

Page 238: ...sed to draw the image intensity profile at the bottom of the screen To position the windows 1 From the Measure screen highlight the icon and press SELECT The Window Position subscreen is displayed Fig...

Page 239: ...rease the size of the windows 3 To exit the Window Size subscreen and return to the Measure screen press ESC Set Window Thresholds For most substrates the recommended threshold for the left and right...

Page 240: ...play Scale Menu Subscreen is displayed Figure 7 19 Figure 7 19 Intensity Display Scale 4 Highlight 1x 2x or 4x and press SELECT 5 To exit the Intensity Display Scale subscreen press ESC 6 To exit the...

Page 241: ...ice versa the small arrow at respective sides of the rectangle shown in the Menu changes from one side to the other For the following description when these settings are completed the left window shou...

Page 242: ...s SELECT The Save Recall Icon subscreen is displayed Figure 7 22 Figure 7 22 Save Recall Icon Subscreen 2 In the submenu highlight the number you want to assign the setup to and press SELECT 3 Highlig...

Page 243: ...particular substrate usually the calibration standard This test should be done after significant changes have been made to the system s configuration or if the pattern being measured is not within pro...

Page 244: ...xit or press ESC Set Up the Measurement Axis The image intensity profile is the middle scan line taken across the active area of both windows in either axis The image intensity profile is a curve that...

Page 245: ...ge the axis from horizontal to vertical or from vertical to horizontal 1 From the Measure screen highlight the icon and press SELECT to toggle the axis between vertical and horizontal 2 Press either t...

Page 246: ...Note When idle the Standby screen is the default display for the system Figure 7 25 When this screen is displayed the system is ready for immediate use If the Standby screen is not displayed you will...

Page 247: ...ID information objective and microscope aperture to be used for measurement Figure 7 26 Production Main Menu and Screen Load a Plate Caution Focus correctly at 10X or you may crash the objective and o...

Page 248: ...holder Figure 7 27 Figure 7 27 Loading a Plate on the Stage Mask Mask Holder Insert Pressure Pin 4 Gently push the mask to the left so that the round pressure pin in the upper left corner of the mask...

Page 249: ...e guide rails of the stage and gently push the plate in to the backstop Figure 7 28 Caution To avoid injury due to pinch points on the stage exercise caution when loading the plate onto the stage Figu...

Page 250: ...n Menu screen If you use a different magnification your measurements will not be valid To select a new measurement program 1 With the Production Main Menu screen displayed highlight Program and press...

Page 251: ...teps in this section only if you need to change existing ID information To change ID entries 1 With the Production Main Menu screen displayed highlight the ID Entry button and press SELECT The ID Info...

Page 252: ...alues To clear statistics from a previous measurement 1 With the Production Main Menu displayed highlight Stats and press SELECT The Statistics window is displayed Figure 7 31 This window displays the...

Page 253: ...auto mode skip this section and go on to the next section Measure in Semi Auto Mode If you want to measure in fully automatic mode skip this section and go on to the next section Measure in Auto Mode...

Page 254: ...is sized correctly the wave at the bottom of the screen will have well defined highs and lows such as in Figure 5 10 3 Once the measurement box has been correctly sized highlight Exit and press SELECT...

Page 255: ...ment box 3 Once you have toggled to the desired direction setting press ESCAPE 4 Press the and keys to move the edge to its correct position 5 To change the direction of the measurement scan a Highlig...

Page 256: ...eature Edges To measure the edges of a feature 1 Highlight the icon and press SELECT The system will then perform an autofocus and measurement routine Measure in Semi Auto Mode L Note You can perform...

Page 257: ...easure Menu 2 Drive the stage to the origin 0 0 3 Focus the origin a Highlight the icon and press SELECT b Use the and keys or the thumbwheel to bring the location into focus 4 Auto drive to the deske...

Page 258: ...location 1 If you want to recall a specific measurement box for the current Go Stop location a Highlight the icon and press SELECT The Recall dialog box is displayed Figuree 7 38 Figure 7 38 Recall D...

Page 259: ...e the procedure in this section to measure in auto mode If you want to perform measurements in manual mode skip this section and refer to the previous section Measure in Manual Mode If you want to mea...

Page 260: ...ment Data In this section procedures are provided for the options on the Supervisor Master Menu screen Figure 7 40 that are not used for program setup These options are Statistics ID Entry Data Map Fi...

Page 261: ...igure 7 41 Statistics Screen 2 To view data from the next measurement select Next This function occurs only if a sequence of measurements is made within a script or one of the system automated cycles...

Page 262: ...screen Figure 7 42 is displayed Figure 7 42 ID Information Screen 2 To change the displayed operator ID type a new name in the Operator ID field and press SELECT 3 To change the displayed substrate i...

Page 263: ...a Map The Data Map dialog box is used to display measurement data in graphical form Once the data is displayed you may also edit individual values within the display The data map function is available...

Page 264: ...ss SELECT b Use the arrow keys to move around the graph and highlight a section you want to edit c Once you have selected a section to edit press SELECT The Edit Value Subscreen is displayed Figure 7...

Page 265: ...d press SELECT Figure 7 46 What do you want to Log Message 14 To return to the Supervisor Master Menu screen select Exit or you can select ESC at anytime 15 Highlight Save and press Select when prompt...

Page 266: ...7 48 Chapter 7 Operation...

Page 267: ...Maintenance Overview Lamp Replacement and Alignment Stage Maintenance Electronics Cabinet Maintenance System Cleaning 8...

Page 268: ...in Figure 8 1 Use this form to plan record and monitor preventative maintenance activities for the KMS 310 400 Table 8 1 Preventive Maintenance Schedule 1 of 2 Interval Procedure Date and Initials Da...

Page 269: ...are working properly Check Piezo for linearity and tilt Check column backlash and torque uniformity Verify functioning of linear scales 5 000 Hours Check condition of lead screws and stage motor coupl...

Page 270: ...ansmitted quartz halogen lamp page 8 7 Replace the transmitted metal halide lamp page 8 9 Replace and align the confocal KLH 1 lamphouse page 8 11 Replace and align the confocal Nikon HMX 3 4 lamphous...

Page 271: ...hours However lamps can become faulty prior to the recommended number of hours You should check lamps periodically for correct operation You will need to replace lamps when they flicker dip while you...

Page 272: ...y Knobs 1 6 Close down the aperture so it is completely visible in the oculars at 10X Figure 8 2 Figure 8 2 Aperture in Ocular View and Focus Aperature partially closed while viewing in the oculars Im...

Page 273: ...s is found when neither blue nor red flare is visible 8 Turn the knob on the transmitted assembly at 10X until the object is slightly over filled Figure 8 3 Figure 8 3 Aperture Open to Over fill Apert...

Page 274: ...of the lamp housing 2 Lift the lid up and back to expose the interior of the lamp housing 3 Slip the lamp up and out of the lamp mount Figure 8 4 Figure 8 4 Quartz Halogen Lamp Mount 1 1 4 Unplug the...

Page 275: ...the rear of the lamp housing Figure 8 5 Figure 8 5 Metal Halide Lamp Housing Rear 1 2 Slide the lid forward slightly and lift straight up and off of the housing Caution To avoid damage to the lamp alw...

Page 276: ...ng clips holding the lamp in place 6 Remove the lamp from the lamp housing 7 Install the new lamp 8 Attach the lamp to the lamp fixture with the two spring clips 9 Fasten the lamp in place with the tw...

Page 277: ...e for installing and aligning the confocal KLH 1 lamp Replace the Confocal KLH 1 Lamp Housing Bulb To replace the confocal KLH 1 lamp 1 Power down the system and leave it off for 10 minutes to cool 2...

Page 278: ...ution To avoid damage to the lamp always wear gloves when removing or installing lamps If you touch the glass surface with your bare hands clean the lamp with alcohol and a clean cloth 4 Unscrew the t...

Page 279: ...new bulb into the socket with the positive side pointing up 10 Slide the bulb along the grooves until the bulb nipple is out of the field of view 11 Tighten down the heat sink screw 12 Reinsert the h...

Page 280: ...izontal lamp adjustment knob e Lamp condenser adjustment knob 3 1 Use the horizontal lamp knob on the lamphouse to bring the scan line just into view at the bottom of the screen 2 Use the vertical lam...

Page 281: ...X 3 4 Replace the Nikon HMX 3 4 Lamp To replace the Nikon HMX 3 4 lamp 1 Power down the system and leave it off for 10 minutes to cool 2 Loosen the lamp housing screw of the Nikon HMX lamp housing Fig...

Page 282: ...amp of the lamp housing door with the wire facing in 8 Tighten the flexible clamp knob 9 Insert the bulb completely into the seat of the fixed clamp 10 Tighten the fixed clamp knob Caution The bulb an...

Page 283: ...r intersecting the reflected image of the lamp electrodes To align the lamphouse 1 If you are working with a Nikon Model 4 with reflecting rear spherical mirror turn one of the mirror adjustment knobs...

Page 284: ...the field of view 9 Load a substrate onto the stage 10 Focus on an object first at 10X then at 100X 11 Use the primary condenser knob to contract the arc uniformly in all directions If you turn the kn...

Page 285: ...ws This section provides instructions for checking table flotation and making necessary adjustments Check Table Floatation To check flotation of the antivibration table Figure 8 15 Figure 8 15 Antivib...

Page 286: ...5 Drive the stage to the front right corner of the mask 6 Locate and focus on an image at 10X 7 Adjust the right front screw on the Piezo to bring the image into focus on the monitor 8 Drive the stag...

Page 287: ...4 Insert but do not tighten the hold down screws on the opposite spring loading guide rail 5 Place the mask holder at the back of and between the guide rails 6 Apply even pressure against the left sid...

Page 288: ...ent will be much easier to find Set the Column Stops Margin of safety is approximately 50 100 microns To set column stops 1 From the Measure screen select the icon and record the scale readout 2 Turn...

Page 289: ...KMS 310 400 Caution Make sure you do not pull any cables or wires when rolling out the electronics tower Figure 8 18 Electronics Tower Air Filters 1 2 1 Top rear air filter 2 Bottom front air filter...

Page 290: ...310 400 Caution Make sure you do not pull any cables or wires when rolling out the electronics tower Figure 8 19 Electronics Tower Fans 1 2 1 Rear two fans 2 Front two fans 2 Remove the seven screws o...

Page 291: ...wing guidelines 1 Use IPA isopropyl alcohol and cleanroom wipes 2 Wipe down the system from top to bottom 3 Do not clean ocular eyepieces objectives and objective casings or the condenser cap with alc...

Page 292: ...8 26 Chapter 8 Maintenance...

Page 293: ...Error Messages System Error Messages Script Error Messages 9...

Page 294: ...e limit Z software limit has been set during objective setup The operator has attempted to drive towards the sample and past the software limit 1 Drive the column back away from the sample 2 If desire...

Page 295: ...ut the files named are non existent or are in the wrong path 1 Check script name and or path for correct spelling 2 Check all INCLUDE commands in the script Make sure that all paths and named scripts...

Page 296: ...s spelled correctly and is followed by a colon Program Does Not Exist LOADPROG command error The program number called out in LOADPROG does not exist Add the appropriate program number called out in L...

Page 297: ...Glossary...

Page 298: ...from an orthogonal X and Y motion stage device The end product of a semiconductor process e g DRAM EPROM or LOGIC die 1 A field sub unit 2 The area of a substrate that contains the device being manufa...

Page 299: ...hen the distance between the sample and the lowest point of the objective are relatively far apart objective RIC Acronym for refractive index correcting An objective used to gather measurement informa...

Page 300: ...mber of quantified levels that a pixel can have reticle see Photomask script Series of commands that direct the KMS system to perform specific functions such as measuring moving the stage and performi...

Page 301: ...inet maintenance Air filter checks 8 23 Fan checks 8 24 Error messages Script error messages 9 3 System error messages 9 2 Exit to DOS 7 7 Eyepiece and condensor cleaning 8 25 H Hot keys 4 7 I ID Info...

Page 302: ...8 Open an existing program 7 10 Operator lockouts 7 14 Overview 7 8 Program Setup Menu screen components 4 24 S Safety precautions Ergonomic features 2 18 Isopropyl alcohol 2 13 Light source safety 2...

Page 303: ...ansmitted condensor 5 4 Transmitted condensor alignment 8 5 Transmitted illumination 5 8 Transmitted metal halide lamp replacement 8 9 U User interface Hot keys 4 7 Keyboard keypad equivalents 4 7 Key...

Page 304: ...I 4 Index...

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