ZYGO KMS-310, Supervisor Manual

Page: 90 / 304

5-4 Chapter 5: System Setup
Configure Illumination Settings
This section provides the following procedures for configuring and adjusting
illumination settings:
ƒ
set up the transmitted condensor
ƒ
set up transmitted illumination
ƒ
adjust illumination controls
Set Up the Transmitted Condenser
You can set up the transmitted condensor in one of two ways:
ƒ
Method 1: Visually set up the transmitted condensor using the ocular
eyepieces, or
ƒ
Method 2: Set up the transmitted condensor using the CONDENSR.SCR
script.
Method 1: Visually Set Up the Transmitted Condensor with the Ocular Eyepieces
To set up the transmitted condensor using the ocular eyepieces:
1. Place the photomask on the stage with the chrome side up.
2. Focus the system on an edge of a chrome feature.
3. Move the chrome edge to the edge of the oculars.
4. Set illumination to minimize eye stress while viewing the image of the
aperture through the ocular eyepieces.
5. Turn the front knob on the transmitted light assembly clockwise until it
comes to the mechanical stop (approximately 3/4 to 1 turn).