ZYGO KMS-310, Supervisor Manual

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KMS-30/400 Supervisor's Manual 5-17
Configure Single-point Calibration
This section provides instructions for configuring single-point calibration and
includes the following procedures:
ƒ
Set the illumination
ƒ
Disable submicron multipoint calibration
ƒ
Set up the measurement window
ƒ
Calibrate the system to standard
Set the Illumination
To set illumination and check single-point mode status:
1. Place the measurement gauge (or standard) on the stage.
2. Focus the condenser assembly for the thickness of the standard.
3. Set the illumination with the 100x objective.
Disable Submicron Multipoint Calibration
To disable submicron multipoint calibration:
1. With the Measure screen displayed, press [ALT + O].
2. View the comment line.
L
Note: If SUBM is not displayed in the comment line, then this option is not installed and
you can skip the rest of this procedure and go on to the next section.
If SUBM is displayed in the comment line, complete the remainder of this procedure to
disable the submicron multipoint calibration function.
3. From the Supervisor Master Menu screen, highlight the Program Setup icon
and press [SELECT].
4. With the Program Setup screen displayed, delete the file name displayed in
the
Multipoint File Name .
5. Highlight the Exit button and press [SELECT] to return to Supervisor
Master Menu screen.
Once the submicron multipoint calibration function has been disabled,
“SUBM FILE INVALID OR DOES NOT EXIST”
is displayed across
the right portion of the screen.