ZYGO KMS-310, Supervisor Manual

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7-26 Chapter 7: Operation
This Statistics selection is only necessary for repetitive measurements on a single
substrate or group of substrates.
8. Select Script to choose a script routine.
The last script run and residing in the Program Setup screen will be involved if this
option is selected. The script will start when the
Measure icon is selected in the
measure screen.
9. To exit the Measure screen, select Exit or press [ESC].
Set Up the Measurement Axis
The image intensity profile is the middle scan line taken across the active area of both
windows in either axis. The image intensity profile is a curve that represents graphically
the intensity changes that occur on the substrate that are defined by the measure
windows.
For horizontal measurements, the image intensity profile is displayed from left to right
at the bottom of the screen (Figure 7-24). For vertical measurements, the image intensity
profile appears from top to bottom at the right of the screen.
Figure 7-24. Image Intensity for Horizontal Measurements