ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor's Manual 8-17
Align the Confocal Nikon HMX 3/4 Lamphouse
The lamp and the condenser create the primary image. The direction of the
primary image is controlled by the knobs, which are attached directly to the lamp
mounting mechanism. If your substrate requires additional light, your lamp
housing may include an additional mirror at the rear of the housing. This mirror
produces a secondary (reflected) image due to this spherical mirror intersecting
the reflected image of the lamp electrodes.
To align the lamphouse:
1. If you are working with a Nikon Model 4 (with reflecting rear spherical
mirror), turn one of the mirror adjustment knobs to move the mirror out of
view (Figure 8-14).
Figure 8-14. Nikon HMX 4 Lamp Adjustment
1
2
1
Mirror adjustment
knobs
2
Primary Condensor
Knob
e
Vertical adjustment
knob
f Horizontal
adjustment knob
e
f
2. Use horizontal, vertical and condenser knobs to center the primary lamp's
cathode and diode in the field of view.
3. Power up the lamp.
4. Remove one of the eyepieces and replace it with the phase telescope.
5. Position the aperture diaphragm at position 1.