ZYGO KMS-310, Supervisor Manual

Page: 140 / 304

6-22 Chapter 6: Creating Automated Scripts
Script Locator
Use the Script Locator reference tables in this section to find the location within this
chapter for definitions of specific script commands. If you know the name of the script
command, use Table 6-2 to identify a page number within this chapter for specific
information about the command. If you do not know the script command name, but do
know what type of function it serves, use Tables 6-3 through 6-20 to identify a page
number within this chapter for specific information about the command.
Listing by Alphabetical Order
Table 6-2 lists all script file commands in alphabetical order.
Table 6-2. Alphabetical Summary List of Commands (Part 1 of 8)
Script Name Function Page Number
AF_EXEC Execute autofocus. 6-48
AF_SET Set up range, swing and step in PIEZO units. 6-48
AF_STAT Turn Autofocus on or off (1/0)
Turn AF on or off measurement
6-48
ALIGN Set current position as align point for subsequent
DESKEW.
6-49
BOX User defined on screen graphic
Vx1 Vy1 Vx2 Vy2 Vcolor [Vfilled]
6-49
CALL Call subroutine MARKER. 6-49
CLEARPIC Erase the displayed picture. 6-50
CLOCK Used to record DOS clock
[Vmth Vdy Vyr]/T[Vhr Vmn Vsc];P=log
DATE+TIME,D=DATE/T=TIME to Vnums
6-50
COMMENT Allows non-command input in script 6-50
DEBUG Allows for single stepping of script 6-51
DESKEW Set the 'polar' angle for stage to mask coordinate
system conversions. 6-51
EDGES Optional command to measure oblique features 6-53
EDGEPOS Optional command to measure relative position of
two edges 6-53
EDGEROUGHNESS Optional command to measure edge roughness 6-54
END End script execution and restart. 6-55