ZYGO KMS-310, Supervisor Manual

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6-54 Chapter 6: Creating Automated Scripts
EDGEROUGHNESS (EDGER)
FUNCTION EDGEROUGHNESS - statistics on two edges
EDGEROUGHNESS: Vhndl V1min V1max V1stddev V2min
V2max V2stddev
Vhndl variable for the matrix handle (20 max matrices
opened at once)
V1min variable for minimum X/Y nanometers, edge 1
V1max variable for maximum X/Y nanometers, edge 1
V1stddev variable for standard deviation nm x 1000, edge 1
V2min variable for minimum X/Y nanometers, edge 2
V2max variable for maximum X/Y nanometers, edge 2
V2stddev variable for standard deviation nm x 1000, edge 2
USE Opens a matrix of N lines by 4 columns to matrix handle Vhndl .
Minimum and maximum positions, standard deviation of edges is
returned. Positional data is nanometers from edge of screen.
Standard deviation is calculated using the equation.
EXAMPLE SCRIPT EDGEROUGHNESS: V11 V12 V13 V14 V15 V16 V17
MESSAGE: “Min X1 = % (nm), Max X1 = % (nm)”, V12, V13
MATRIXWRITE: V11 EDGESXY.MTX
MATRIXCLOSE: V11
RELATED SCRIPTS STATEDGE
Figure 6-4. Example on Vertical Edges - Edge Roughness
N
∑
(X
2
) - (
∑
X)
2
û
N (N-1)
Mean X
1
Mean X
2
Edge 1
Edge 2
Min X
2
Max X
2
Measure window
X = 0
Screen