ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor's Manual 6-47
Column Focus Command
The column focus function is useful in finding an image with low magnification
objectives over an extended range, ordinarily more than 100 microns. Though column
moves are motor-encoder based, the function returns a Z-scale position value. The
entire video field is metered for peak intensity.
!
Caution: The column focus function can crash the optical objective into the specimen.
The positive (lower) hardware Z-limit switch MUST be set before this function can be
safely used. To set the Z-positive limit, proceed as follows:
1. Manually focus upon the highest feature of the specimen, using the
highest (installed) magnification objective.
2. Note the Z-scale reading (in tenth microns).
3. Drive the objective 100 microns closer (up arrow key with FOCUS ICON
selected) to the specimen.
4. Using an 1/8-inch Allen key, set the Z-limit so that the limit LED
illuminated at this point.
Table 6-25. Column Focus Command
Script Name Functional Category Page Number
FOCUSIMG Vsets Vtype
Seek peak focus using column (minimum step is
100 nm). If Vsets, uses FF_SET values; if Vtype,
uses edge contract; otherwise uses peak intensity
(confocal).
6-57