ZYGO KMS-310, Supervisor Manual

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3-2 Chapter 3: System Overview
Product Overview
The KMS-310/400 Critical Dimension Measurement and Inspection System
(Figure 3-1) is a completely automated pattern recognition and measurement
system. The combination of high-resolution capabilities, a confocal microscope
with a shallow depth of focus, and pattern recognition routines allow for easy
capture of optical images for measurement. These images can be used for precise
inspection and measurement of the selected feature and for solving a variety of
measurement and inspection problems.
Figure 3-1. KMS-310/400 System Critical Dimension Measurement and Inspection System
The KMS-310/400 system is a completely automated measuring system. It
consists of measurement electronics, a confocal optics module, and a computer-
controlled programmable 8" x 8" stage with automatic Piezo-controlled focus.
The KMS-310/400 system can locate previously programmed features under a
high-magnification objective to within 2-5 microns (depending on your system's
configuration) and can measure depth differences in the Z-axis to a 3 sigma value
of 0.03 microns.
Script Routines
Script routines allow you to automate control of physical, hardware and user-
programmed software components of the KMS-310/400. Individual scripts can
be written and stored for use by fab operators. By creating a script, you can
create an automated solution to many, if not all, types of measurement problems
that can be imaged within the microscope optics.