ZYGO KMS-310, Supervisor Manual

Page: 174 / 304

6-56 Chapter 6: Creating Automated Scripts
FF_SET
FUNCTION FF_SET: Vrange Vstep; units are in nm
Vrange - range to focus through (nm)
Vstep - stepsize (nm)
USE Sets range and step for the FOCUS commands
FOCUSFAST and FOCUSIMG will search through the range
selected to find the best focus (either surface or edge ) within the
range.
EXAMPLE SCRIPT FF_WIN:120 140 520 340
FF_SET:10000 500
FOCUSFAST:1 1
RELATED SCRIPTS FOCUSFAST; FINDSURF; FOCUSIMG; FF_WIN
FF_WIN
FUNCTION FF_WIN: Vx1 Vy1 Vx2 Vy2
USE Sets the region of interest for focus commands. The focus
commands will use this window, in conjunction with the FF_SET
parameters to find the best focus.
EXAMPLE SCRIPT FF_WIN:100 100 540 450
RELATED SCRIPTS FOCUSFAST; FOCUSIMG
FINDSURF
FUNCTION FINDSURF: [Vnum];
If Vnum return Piezo stack position in Vnum
Uses RP_WIN as region of interest.
USE Finds best surface in RP_WIN and optionally returns the Piezo
stack position in Vnum. Used to quickly find the best “surface”.
Must be in Confocal mode.
EXAMPLE SCRIPT RP_WIN:100 100 200 200
FINDSURF:V97
RELATED SCRIPTS FOCUSFAST; FASTSURF; FOCUSIMG; RE_WIN