ZYGO KMS-310, Supervisor Manual

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5-6 Chapter 5: System Setup
8. Open the aperture to slightly overfill the 10X objective (Figure 5-3) once
the focus is found.
This is accomplished by rotating the aperture knob (the front knob on the
transmitted assembly) counterclockwise.
Figure 5-3. Aperture Open to Overfill.
Aperture completely open while
viewing in the oculars.
Image outside of ocular circle is
not visible to the eye
9. Set the illumination for each objective.
Method 2: Set Up the Transmitted Condensor Using the CONDENSR.SCR Script
To set up the transmitted condenser using the CONDENSR.SCR script:
1. Place the photomask on the stage with the chrome side up.
2. Focus the system on an edge of a chrome feature.
The chrome image should be out of the measurement screen completely
when looking at the monitor.
3. Set illumination so that the camera is not overdriven while working in the
10X objective.
4. Rotate the front knob on the transmitted light assembly clockwise until it
comes to the mechanical stop (approximately 3/4 to 1 turn).
5. Close down the aperture so it is completely visible in the oculars at 10X
(Figure 5-2).