ZYGO KMS-310, Supervisor Manual

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KMS-30/400 Supervisor's Manual 5-21
Calibrate the System to Standard
To calibrate the system to standard:
1. From the Calibration screen, highlight the Calibrate button and press
[SELECT].
The Calibration Control submenu is displayed.
2. Highlight the icon and recall Window 1.
3. Highlight the icon and move the Measure window as shown in Figure
5-16. Make sure that the correct edges are for pitch.
Figure 5-16. Measure Window Movement
Line
Pitch
4. Set the scan direction for measurement using the standards listed in
Table 5-2.
Table 5-2. Scan for Measurement Standard Directions
Standard Left Right
RKS
Æ Æ
NBS
Æ Å
NIST
Æ Å
5. From the Measure screen, highlight the icon and press [SELECT].
The following message will be displayed in the comment line once pitch
calibration is completed :
HORIZONTAL PITCH = =0.0567 MICORNS/PIXEL