ZYGO KMS-310, Supervisor Manual

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6-8 Chapter 6: Creating Automated Scripts
stored in the associated pattern registers. To get this information you must RP_READ: it
into a variable.
For example, the following is a typical sequence of script commands to perform a
pattern rec:
BOX:150 300 500 350 2 (Draw a box to show window)
RP_WIN:150 300 500 350 (Define the window)
RECPT:0 0 1 1 50 (define the rec_pt’s)
RECPT:1 0 1 2 50
RP_EXEC:0 2 (execute the pattern rec)
RP_READ:0 V20 (Read the locations of the edges)
RP_READ:1 V22
Once the edges have been found, you can set up the sequence windows. The sequence
windows are where features are actually measured.
Sequence Windows
Sequence windows are very similar to pattern recognition windows, especially in how
they are set up. To set up sequence windows you will set the windows. There are two
windows per sequence setup, 0 and 1, which correspond with the left and right or top
and bottom in vertical measurements.
After defining the sequence windows, you can define the edges to be detected. The
SEQEDGE: command requires six parameters, as opposed to the five parameters
required by REC_PT:
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The first SEQEDGE: command parameter is the same as the pattern register
number. It specifies which sequence setup the window will be stored in.
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The second parameter defines which window (0 or 1) you are specifying. For each
axis horizontal/vertical measurements, 0 is the top-left window and 1 is the bottom-
right window.
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The third parameter defines the axis as 0 or 1. As with pattern recognition
command RECPT: the 0-axis is horizontal and the 1-axis is vertical.
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The fourth parameter is the direction. 0 is negative and 1 is positive.
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The fifth parameter is the number of the edge to seek.
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The sixth parameter is the threshold to use for the edge derivative algorithm.