ZYGO KMS-310, Supervisor Manual

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7-40 Chapter 7: Operation
2. Highlight the Go-Stop location number on the keypad and press [SELECT].
3. Highlight ALIGN and press [SELECT].
4. Highlight SAVE and press [SELECT]
5. Highlight GO and press [SELECT].
6. Drive the stage to the deskew point.
7. Highlight SKEW and press [SELECT].
8. Highlight S AVE and press [SELECT].
9. Move to each consecutive Go-Stop location and save the coordinates by
highlighting
SAVE and pressing [SELECT].
Measure Edges
To measure edges for each Go-Stop location:
1. If you want to recall a specific measurement box for the current Go-Stop location:
a. Highlight the icon and press [SELECT].
The Recall dialog box is displayed (Figuree 7-38).
Figure 7-38. Recall Dialog Box
b. Highlight the recall number on the keypad and press [SELECT].
c. Highlight RECALL and press [SELECT].
d. Press [ESCAPE] to close the window.
The previously saved measurement box you selected is then displayed
automatically.
L
Note: You can use the Recall dialog box at any time to display a previously saved
measurement box.
2. Highlight the icon and press [SELECT].
The system will then perform an autofocus and measurement routine at the selected
Go-Stop location.