ZYGO KMS-310, Supervisor Manual

Page: 171 / 304

KMS-310/400 Supervisor's Manual 6-53
EDGEPOS
FUNCTION EDGEPOS: Vhndl Vedge1 Vedge2 Vcenter
Store x,y edge coordinates into matrix with and return mean edge
position and center.
Vhandl is variable to be used for the matrix handle (20 max
handles opened).
Vedge1is variable to be used for returning the position of
edge1 in nm.
Vedge2 is variable to be used for returning the position of
edge2 in nm.
Vcenter is variable to be used for returning the position of
the center.
USE Opens a MATRIX then executes ‘MEASURE: 1’; storing the x,y
screen coordinates of the two edges into a matrix whose handle is
Vhndl. The matrix
y-dimension is returned in variable Vlines
where the y-dimension is fixed at 4.
This command assumes horizontal or vertical edges and parallel.
The edge coordinate returned is the mean of x’s (or y’s if edge
direction is horizontal).
Vcenter = ( Vedge2)/2.
The purpose of this command is to determine the accuracy of the
overlaying of one layer upon another by locating the central
demarcation.
EXAMPLE SCRIPT Figure 6-3 is an example of the Matrix Edge Position.
SEQWIN:1 0 V20 V16 V21 V17
SEQWIN:1 1 V20 V16 V21 V17
SEQEDGE:1 0 0 0 1 35
SEQEDGE:1 1 0 0 2 35
EDGEPOS: V50 V47 V48 V49
::
::
MATRIXCLOSE: V50
RELATED SCRIPTS MATRIXWRITE, MATRIXVALUE, EDGES (Figure 6-3)
Figure 6-3. Matrix Edge Position
0 edge 1 center edge 2