ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor's Manual 3-15
Peizo Assembly
The Piezo control assembly is mounted on top of the stages. The Piezo control
assembly can support considerable weight in the Z-axis but is also very sensitive
and can be damaged by jarring or displacement in the X or Y plane. The Piezo
control assembly is held in place by steel guide pins that help prevent damage if a
tight rotation is applied to the Piezo mechanism.
Microscope Mounting Stand and Column
Optics with associated Z-axis controls (coarse) are supported by a vertically
mounted column. This entire assembly is placed on the antivibration, air-isolated
table. The precision ground base has locating pins in which the X-Y table is
centered.
The column supports the entire optics system and can be adjusted over
approximately 3 in. of travel, depending on your capabilities. A DC motor drives
the column and the absolute position is constantly monitored by a linear encoder
attached directly to the column. The Z-axis motor position is also monitored by a
rotary encoder attached directly to the motor.
Once the system is initialized, the Z-axis will return to a preset, rear focus
position.
Antivibration Table
Due to the extremely fine focal plane and high magnification of the KMS-
310/400 system, it is necessary to mount the stage, microscope and focusing
column on an air-filled, antivibration table. The table uses four corner-mounted
pistons that eliminate mechanical vibrations. This table requires a minimum
compressed air (or nitrogen) supply of 50 psi (preferably 80 psi). A compressed
air indicator gauge is visible from under the table. However, this gauge does not
read actual line pressure psi.
When making measurements or observations, always be certain that all four
corners of the antivibration table can be moved up or down independently
without restriction.
Articulated Monitor Stand
The VGA monitor is mounted to the top of an articulated counterbalanced stand.
This stand allows the screen position to be adjusted for comfort and individual
preferences. The ergonomic features of this stand help minimize fatigue while
working the system. To adjust the monitor position grip the front handle, then lift
and push.