ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor's Manual 8-5
Lamp Replacement and Alignment
This section provides instructions for each of the following lamp replacement
and alignment procedures:
ƒ
Visually check lamps.
ƒ
Align the transmitted condenser.
ƒ
Replace and align the transmitted quartz halogen lamp.
ƒ
Replace and align the transmitted metal halide lamp.
ƒ
Replace and align the confocal KLH-1 lamphouse.
ƒ
Replace and align the confocal Nikon HMX 3/4 lamphouse.
Visually Check Lamps
Lamps are normally replaceD according to the manufacturer's recommendations.
Xenon bulbs should be replaced every 400 hours and Mercury bulbs every 200
hours.
However, lamps can become faulty prior to the recommended number of hours.
You should check lamps periodically for correct operation. You will need to
replace lamps when they:
ƒ
flicker (dip while you are in focus)
ƒ
will not turn on (fire up)
ƒ
are dim
ƒ
do not maintain adequate intensity when you are viewing a substrate
When lamps need to be replaced, refer to subsequent procedures in this section
for lamp replacement and alignment instructions.
Align the Transmitted Condenser
L
Note: Perform this procedure only when changing mask thicknesses.
To visually set up the transmitted condenser through oculars:
1. Place the photomask on the stage with the chrome side up.
2. Focus the system on an edge of a chrome feature.
3. Move the chrome edge to the edge of the oculars.
4. Set the illumination to minimize eye stress.