ZYGO KMS-310, Supervisor Manual

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6-48 Chapter 6: Creating Automated Scripts
Script Commands
This section provides detailed information for all script commands. Script commands
are listed in alphabetical order.
AF_EXEC
FUNCTION Executes autofocus. Uses the current SEQWIN to autofocus,
utilizing the current settings in AF_SET: for Range Swing and
Step
USE Searches through RANGE nanometers (within Piezo range) for
the best focus. After it passes through the best focus, it SWINGS
back through the focus, STEP nanometers at a time until it finds
the BEST focus.
OPTIONS None. Execution of the command takes no parameters.
EXAMPLE SCRIPT AF_SET: 1024 256 16 AF_EXEC:
RELATED PROCEDURES AF_SET; SEQWIN; AFSTAT
AF_SET
FUNCTION Vrange Vswing Vstep
Sets the Range Swing and Step for the AF_EXEC command.
USE Sets the Range, Swing and Step parameters for autofocus in Piezo
ticks. For the 20 micron Piezo, each tick is 4 nm; for the 30
micron Piezo, each tick is 7 nanometers. This is the resolution of
focus for the respective Piezo’s.
OPTIONS None
EXAMPLE SCRIPT AF_SET: 1024 256 16AF_EXEC:
RELATED SCRIPTS AF_SET; AFSTAT
AF_STAT
FUNCTION Toggle Autofocus on measurement. AF_STAT:[0|1]
USE Allows script control of measurement autofocus. Usually set to
on by default, and best left on for the most reliable and repeatable
measurements.
OPTIONS None
EXAMPLE SCRIPT AF_STAT:0
RELATED SCRIPTS AF_SET; AF_EXEC