ZYGO KMS-310, Supervisor Manual

Page: 146 / 304

6-28 Chapter 6: Creating Automated Scripts
Table 6-2. Alphabetical Summary List of Commands (Part 7 of 8)
Script Name Function Page Number
RP_READ Get result from pattern recognition search. 6-92
RP_WIN Vx1 Vy1 Vx2 Vy2; (upper left, lower right). Set
pattern recognition window.
Defines area of search for edge detection pattern
recognition routine.
6-92
SEQEDGE Defines edge(s) for measurement sequence setup.
Vseq[0-9] Vwin[0,1] Vaxis[H=0,V=1]
Vdir[PLUS=1,NEG=0] Vedge[1-100] Vth
6-93
SEQNAME Set the name of measure sequence. 6-94
SEQOUTPUT Select measurement output type; mean, maximum,
or minimum. 6-94
SEQWIN Defines windows for measurement sequence setup 6-94
SETSTOP Set stop to V_x, V_y in coordinate system (in 1
microns). 6-95
SHOWPIC Load saved image to display screen. 6-95
SILENT Toggles on and off if the interpreted commands
will be echoed to screen 6-95
SITENAME Set the measure site name to 'name'. 6-95
SPAWN Execute DOS command with parameters. 6-95
START Restarts the script from the beginning 6-96
STATEDGE Measure edge statistics in subpixel values. 6-96
STATMSR Get statistics for a sequence window/collector with
1 sigma output. 6-96
STATMSR3 Get statistics for a sequence window/collector with
3-sigma output. 6-97
STATS Statistics operation command; used to turn on/off,
print, clear or ask for operator input 6-97
TEXT Graphic display of text to screen 6-98
TIME Places time system has been running into variable
(in seconds*10). 6-98
TURRET Position turret to location 1 through 5. 6-99
TURRETFF Turns fastfocus on/off after each turret move. 6-99
TURRETPOS Read current turret position. 6-99