6-36
Chapter 6: Creating Automated Scripts
X-, Y-Axis Position Commands: Stage Motors
These commands allow the user to control positioning of X-axis and Y-axis using the
stage motors.
Units =
1
um
Resolution =
0.2
um
Typical error
=
1 um
Polar-Mask Coordinate Movement Commands
These commands allow the user to manage polar-mask coordinate movements.
Table 6-12. Polar-mask Coordinate Movement Commands (1 of 2)
Script Name
Functional Category
Page Number
ALIGN
Set current position as
align
point for subsequent
DESKEW.
6-49
DESKEW
Set polar angle for coordinate system.
6-51
GETSTOP
Vstopnum V_x V_y [Valigned]
Get stop in Vx, Vy in (aligned) coordinate system
(in 1 microns).
6-58
GO_ORIGIN
Move stage to ORIGIN.
6-60
GOSTOP Vstopnum
Go to preprogrammed position 0 - 99.
6-60
MASK_ORIGIN
Set mask coordinate origin at current position or
Vx Vy nms stage coordinates.
6-69
MOVEPOL V_x
V_y
Move to position in aligned and deskewed
coordinate system (in 1 microns).
6-78
MOVEPOLZ V_x
V_y
Performs MOVEPOL: with Z-axis correction
6-79
MOVEPOL_NM
Move to 'polar' x/y @ 0.1 um resolution (in
a deskewed space).
6-79
MOVEPOLZ_NM
Move to 'polar' x/y coordinates with Z
compensation in 0.1 um resolution.
6-80
ORIGIN [V_x
V_y]
Set ORIGIN to current position (offset by optional
V_x V_y values).
6-82
POSPOL V_x
V_y
Get position in aligned and deskewed coordinate
system (in 1 microns).
6-88
Summary of Contents for KMS-310
Page 10: ...Contents viii...
Page 33: ...System Overview Product Overview Subsystem Overview Functional Overview 3...
Page 51: ...User Interface Overview Software Controls Software Organization 4...
Page 119: ...Creating Automated Scripts Overview Script Creation Script Locator Script Commands 6...
Page 266: ...7 48 Chapter 7 Operation...
Page 292: ...8 26 Chapter 8 Maintenance...
Page 293: ...Error Messages System Error Messages Script Error Messages 9...
Page 297: ...Glossary...
Page 304: ...I 4 Index...