ZYGO KMS-310, Supervisor Manual

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8-2 Chapter 8: Maintenance
Overview
This chapter provides a blank Preventive Maintenance Schedule to be used in
planning and tracking periodic preventive maintenance of the KMS-310/400
system, as well as step-by-step procedures for each recommended maintenance
activity.
This section provides a blank Preventive Maintenance Schedule, and lists
maintenance procedures provided in subsequent sections of this chapter.
Preventive Maintenance Schedule
A Preventive Maintenance Schedule form is provided in Figure 8-1. Use this
form to plan, record and monitor preventative maintenance activities for the
KMS-310/400.
Table 8-1. Preventive Maintenance Schedule (1 of 2)
Interval Procedure Date and Initials
Daily Ensure that the system is floating
free on the antivibration table.
Visually check lamp alignment and
ensure that the lamp is free of flicker.
Weekly Ensure proper operation of turret for
centration.
Ensure proper operation of column
for parfocality.
Ensure that lamp is adjusted for
proper uniformity and centering.
Ensure the microscope optics are free
of dust and dirt; then clean as
required.
Check Xenon or Mercury lamp.
Check calibration of the system to
standard.
Perform system diagnostics.