ZYGO KMS-310, Supervisor Manual

Page: 98 / 304

5-12 Chapter 5: System Setup
Adjust Focus Control
If the substrate is visible through the microscope or on the monitor, but is not in
focus, some adjustments may be required. This section provides instructions for
adjusting both coarse and Piezo fine focus settings. Both coarse and Piezo fine
focus adjust the focus offsets between objectives.
Adjust Coarse Focus
Coarse focus is accomplished with a servo motor driven column that uses a 0.1
micron linear scale for positioning repeatability. If the object cannot be focused
within ±5 microns of the Piezo 0.00 position, you must adjust the column's
position.
To adjust course focus:
1. From the Measure Screen, highlight the icon and press [SELECT].
2. Press [MENU].
The Z Motor Speed Menu subscreen is displayed (Figure 5-8).
Figure 5-8. Z Motor Speed Menu Subscreen
3. Use the
Ð
and
Ð
arrow keys to select a higher or slower speed, then press
[SELECT].
4. Use the
Ï
and
Ð
arrow keys to achieve coarse focus.
5. Press [ESC] to exit the Focus icon.