ZYGO KMS-310, Supervisor Manual

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KMS-310/400 Supervisor’s Manual 2-12
Metal Halide Light Box
The metal halide light box is equipped with a safety interlock feature. When the
light box is opened, the power circuit loop is placed into an open state and no
power reaches the lamp. The lamp will not turn while the light box is open.
Take the following precautions when working in and around the metal halide
light box:
1. Never open the light box when the lamp is on.
2. Use a hex wrench to remove the liquid light guide (attached to the metal
halide light box). This feature helps prevent unnecessary access and IR/UV
exposure.
3. Never stare into the light source.
Halogen Lamphouse
Use a hex wrench to remove the HMX-2 halogen lamphouse from the EPI
illuminator. This feature helps prevent unnecessary access and IR/UV exposure.
Mercury Lamphouse
Take the following precautions when working in and around the mercury
lamphouse:
1. Use a hex wrench to remove the HMX-4 mercury lamphouse from the K2
module. This feature helps prevent unnecessary access and IR/UV exposure.
2. Never stare into the light source.
Xenon Lamphouse
Take the following precautions when working in and around the xenon
lamphouse:
1. Use a hex wrench to remove the HMX-4 xenon lamphouse from the K2
module. This feature helps prevent unnecessary access and IR/UV.
2. Never stare into the light source.