ZYGO KMS-310, Supervisor Manual

Page: 4 / 304

Contents ii
Using the Keypad .................................................................................................................................................. 4-4
Keypad/Keyboard Key Equivalents ....................................................................................................................... 4-7
Hot Keys ................................................................................................................................................................ 4-7
S
OFTWARE
O
RGANIZATION
......................................................................................................................................... 4-10
Standby Screen ................................................................................................................................................... 4-11
Supervisor Master Menu ..................................................................................................................................... 4-12
Measure Screen .................................................................................................................................................. 4-14
Statistics Menu .................................................................................................................................................... 4-16
ID Information Menu ............................................................................................................................................ 4-18
Select Program Menu ......................................................................................................................................... 4-20
Data Map Menu ................................................................................................................................................... 4-22
Program Setup Menu .......................................................................................................................................... 4-24
Sequence Setup Menu ........................................................................................................................................ 4-26
Operator Lockouts Menu ..................................................................................................................................... 4-28
Calibrate Menu .................................................................................................................................................... 4-30
System Setup Menu ............................................................................................................................................ 4-32
Save Program Menu ........................................................................................................................................... 4-34
Exit to DOS ......................................................................................................................................................... 4-35
Return to Standby Selection ............................................................................................................................... 4-36
CHAPTER 5: SYSTEM SETUP ..................................................................................................................................... 5-1
O
VERVIEW
.................................................................................................................................................................. 5-2
C
ONFIGURE
I
LLUMINATION
S
ETTINGS
............................................................................................................................ 5-4
Set Up the Transmitted Condenser ....................................................................................................................... 5-4
Set Up Transmitted Illumination ............................................................................................................................ 5-8
Adjust Illumination Controls ................................................................................................................................. 5-10
Adjust Focus Control ........................................................................................................................................... 5-12
D
EFINE
C
ALIBRATION
P
ARAMETERS
............................................................................................................................ 5-14
Select Calibration Parameters ............................................................................................................................ 5-15
Calibrate the Microscope .................................................................................................................................... 5-15
Calibrate Horizontal Settings ............................................................................................................................... 5-16
Calibrate Vertical Settings ................................................................................................................................... 5-16
Configure Single-point Calibration ...................................................................................................................... 5-17
Save the Calibration Settings .............................................................................................................................. 5-22
D
EFINE
S
YSTEM
O
PTIONS
.......................................................................................................................................... 5-23
Display the System Setup Window ..................................................................................................................... 5-23
Set Map Colors ................................................................................................................................................... 5-24
Change your Supervisor Access Code ............................................................................................................... 5-25
Change Objective Assignments on the Turret .................................................................................................... 5-25
S
ET
O
BJECTIVE
P
ARFOCALITY AND
P
ARCENTRICITY
..................................................................................................... 5-27
A
DJUST
A
UTOFOCUS
P
ARAMETERS
............................................................................................................................ 5-29
Set Column Autofocus ........................................................................................................................................ 5-29
Set Piezo Autofocus Algorithm ............................................................................................................................ 5-31
CHAPTER 6: CREATING AUTOMATED SCRIPTS ..................................................................................................... 6-1
O
VERVIEW
.................................................................................................................................................................. 6-2
Script Features ...................................................................................................................................................... 6-2
Script Command Types ......................................................................................................................................... 6-7
Matrix File Input and Output ................................................................................................................................ 6-10
S
CRIPT
C
REATION
..................................................................................................................................................... 6-14
Overview ............................................................................................................................................................. 6-14
Plan the Script ..................................................................................................................................................... 6-14
Locate Feature Edges ......................................................................................................................................... 6-14
Set Up Align and Deskew for the Mask ............................................................................................................... 6-15
Set Up Planarity for the Mask ............................................................................................................................. 6-15
Obtain Substrate Information .............................................................................................................................. 6-15