ZYGO KMS-310, Supervisor Manual

Page: 194 / 304

6-76 Chapter 6: Creating Automated Scripts
MEASURE
FUNCTION MEASURE: Vpause
Measure and pause for Vpause (default =1) seconds afterwards
USE Actually initiates a mesaurement on the currently active sequence
window setup
EXAMPLE SCRIPT MEASURE:1
RELATED SCRIPTS SEQWIN; MSR_STATS; MSR_DEFAULT; MSR_ERROR;
RESULT
MEASURE_ALGORITHM
FUNCTION MEASURE_ALGORITHM: Type Vaaa, Vbbb, Vccc, Vddd,
Veee
TYPE=AVERAGE
Vaaa=MIN THRESHOLD
Vbbb=PIXELWIDTH @ MIN THRESHOLD
Vccc=MAX THRESHOLD
Vddd=PIXELWIDTH @ MAX THRESHOLD
Veee=MEASUREMENT THRESHOLD
USE Allows the user to define in the script the type of measurement
algorithm to use either the standard method or the optional
method for use with phase shift masks and resist coated masks.
The command, when set for the optional method, allows the user
to define the maximum threshold and associated pixel width, the
minimum threshold and associated pixel width, and the
measurement threshold. This command supersedes the
SEQEDGE threshold detection criteria.
EXAMPLE SCRIPT MEASUREALGORITHM: AVERAGE 10 30 95 30 35
RELATED SCRIPTS MEASURE, SEQEDGE
MENU
FUNCTION MENU:Vnum, [“title str”,] "Option-1", "Option-2"
USE Allows the script to prompt the operator with a list of choices;
returns the number of the “choice” in Vnum, which can then be
used in a series of MATH: JUMP: statements
EXAMPLE SCRIPT MENU:V66"SELECT PRODUCT TYPE" "Wxx 3 SITE","Txx 3
SITE","Pxx 3 SITE”
MATH:V67=V66=1
JUMP:V67 NANO2
MATH:V67=V66=2
RELATED SCRIPTS MATH: JUMP: CALL: