MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
14
Table 5.1
% Readout Based on Bubbler Chemical Level
1.2L Trans-LC™
(gm)*
% of Full
Height
Liquid level
definition
Physical definition
W<235
11
Level < 0.53”
(1.35cm)
Chemical level below all
level sensors
236<W<431
23
Level > 0.53”
(1.35cm)
Chemical level below top 7
level sensors
432<W<652
34
Level > 1.03”
(2.62cm)
Chemical level below top 6
level sensors
653<W<857
46
Level > 1.53”
(3.89cm)
Chemical level below top 5
level sensors
858<W<1059
57
Level > 2.03”
(5.16cm)
Chemical level below top 4
level sensors
1060<W<1255
68
Level > 2.53”
(6.43cm)
Chemical level below top 3
level sensors
1256<W<1414
80
Level > 3.03”
(7.7cm)
Chemical level below top 2
level sensors
1415<W<1443
91
Level > 3.53”
(8.96cm)
Chemical level below top
level sensor
W>1531
100
Level > 4.03”
(10.24cm)
Chemical level above all
level sensors
*The gram values are approximations and for reasons stated above, should be used for
reference only. By scaling to accommodate for density differences, the user may
approximately correlate these gram values to different chemical weights.
5.2.5
Liquid Level Alarm
–
Stainless Steel Source Container
Refer to Chapter 8, VaporGuard® Stainless Steel Source Configuration for detailed
description of this configuration.
