MNL000425.doc
Revision 0
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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1
Chapter
7
Calibration
1.1
Introduction
This section of the manual contains maintenance instructions for the VaporGuard®
Absolute Control System in the form of Calibration procedures, Safety test, and
Troubleshooting guides. The servicing technician should be familiar with Chapter 2
before attempting to troubleshoot the system.
1.2
Calibration
1.2.1
Equipment Required for Calibration of VaporGuard® Circuit
A completely assembled VaporGuard® Absolute Control System
Temperature Calibration PCA, P/N 146617, refer to figure 7-1
Digital Volt Meter (accuracy = ±0.05VDC/ ±0.5mADC & ±0.05Ω)
Remote Display Module
1.2.2
Temperature Calibration of RTD Circuit
The temperature control will retain its calibration over long periods. The calibration
procedure only needs to be performed when the display of set point and probe
temperatures, after stabilization, varies by more than ±0.3 °C, or when the system has
been repaired and components replaced.
The calibration procedure requires a temperature calibration PCA, also known as a
probe simulator PCA (P/N 146617). This PCA is designed to simulate the RTD. The
probe will calibrate the circuit for the RTD.
Do not adjust the potentiometers on the temperature calibration PCA. The resistors are
configured at the factory to a precise value against a traceable standard. Any
tampering with the calibration potentiometers will void the calibration of the RTD circuit.
