MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
54
K
i
=scale factor for integral term and is shown in text as “Heat Intgral”
K
d
=scale factor for derivative term and is shown in text as “Heat Derivat” e
pv
=T
MEASURED
- T
SETPOINT
e
pv -1
=previous error term
INT RST TIME (IRT) is the interval reset time. This is the summation (in the integral
term from the above equation) for n=0 to n=x samples. Where n is the number of
samples and x is the desired sample count to be summed. A summation, if taken in
small enough increments, will give rise to an integral for t=0 to t= IRT.
Aside from the IRT, the other parameter which can be changed is the gain factor. The
heater PID loop is used for the Source Cup heater while in heat mode.
S E T
P I
D
C O E F F
X = E X I
T
√ = E X E C U T E
Pressing the “√” key will bring up the submenu for changing the individual PID
parameters. The parameters have 10 bits of resolution. Therefore the range is 0 to 1000
for all parameters.
H E A T
P R O P O R T
1 5 0
H E A T
I
N T G R A L
1 5 0
Using the right (or left) arrow keypad will scroll through the other parameters.
H E A T
D E R I
V A T
4 0 0
I
N T
R S T
T I
M E
1 8 0
The integral reset time is in minutes and the range is from 0 to 999.
C O O L
P R O P O R T
1 0 0
