MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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PIN 23: +7VDC OUTPUT -
This 7VDC output is provided as a utility output.
PIN 13: REMOTE STOP -
This digital input functions like a remote emergency off
(EMO) signal. When interfaced to a process tool, the tool can remotely disable the
VaporGuard® and turn off the Source Cup Assemblies heating and cooling functions.
PIN 19: TOOL READY -
Not used. This digital input is provided as future input for use
with the Chemical Refill system.
PIN 1 & 14: ISOLATED REMOTE TEMPERATURE HIGH 1/LOW 1 ALARM ‐
This
output provides an open or closed contact if the temperature exceeds the set point by
the specified number in the set up screen (in °C) for Temp High 1 and Temp Low 1.
The contact is closed when no alarm condition exists and will open when Temp High 1
or Temp Low 1 alarm occurs.
PIN 3 & 15: ISOLATED LOW CHEMICAL LEVEL ALARM -
This output provides an
open or closed contact if the level of chemical in the Bubbler reaches the Low Level
set-point, selected in the set up screen. The contact is closed when chemical in
Bubbler is above the Low Level set-point and will open when chemical reaches the Low
Level set-point and Low Chemical Level alarm is activated.
PIN 4 & 16: ISOLATED ANY ALARM -
This output provides an open or closed contact
if any alarm is activated on the VaporGuard®. The contact is closed when no alarm
condition exists and will open when any alarm occurs.
