MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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The STOP position of the switch is a hardwired interlock input which the processor
monitors. When an alarm condition occurs, the red light will flash. Only an alarm
condition will trigger the flashing red LED. When the alarm is cleared, the red light will
turn solid red.
Depending on the alarm type, the green light in the switch may or may not turn off. If
the green light is not lit, push the rocker switch to the START position to return to
normal operation.
There may be situations where the red light will be flashing and the green light will be
on. This means that the unit is still in control, however an alarm condition exists. There
are some alarms that will automatically remove the power as they are hardwired
interlocks, i.e. Temp Probe NOT Installed interlock.
5.2.4
Liquid Level Alarm
–
Quartz Bubbler
The Source Cup Assembly has slots on opposite sides which allow for IR (infrared) light
transmission for liquid level detection. Eight Infrared LEDs on a Transmit PCA and 8
Phototransistors on a Receiver PCA form a line of sight transmission and detection,
refer to figure 5-4C to monitor the presence of liquid inside the bubbler.
