MNL000424.doc
Revision 00
08/26/2016
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
-
47
Do not
lift or handle bubblers by the valves.
Follow site procedure and using Proper Protection Equipment to handle the
bubbler to prevent injury or cause damage while handling bubbler.
For installing or removing the bubbler from the temperature controller use both
hands. Grasp the quartz stem close to the bubbler body while utilizing the other
hand to support the side of the bubbler.
It is critical that valve sequencing instructions be followed.
End users should adhere to the recommended carrier gas flow rates.
If you require additional assistance, please call Versum Materials, Inc. Equipment
Technical Services at
1-866-624-7677
.
6.6.3
Decommissioning Procedure
1.
Don the appropriate PPE according to the chemistry. Verify that there are no
chemical spills or leaks on or near the VaporGuard®. If a spill or leak is
found refer to section 4.7 for the Decontamination Procedure.
2.
Turn OFF the Power Supply Module. Insure that the incoming gas to the source
container is turned off.
3.
Remove the source container; reference section 6.6.2 for bubbler and 8.6 for SS
container. If there is chemical remaining, it’s the end-user/customers’
responsibility to determine its reuse, displacement, or disposal. Undamaged
containers can be reused. If applicable, replace with a new container.
NOTE:
Under normal VaporGuard® operating conditions, the valves connection and
the internal surface areas of the Quartz Bubbler or S.S. container comes in
contact with the chemical.
4.
After the source container has been removed, disconnect all cables from the
Source Cup Assembly.
5.
Disconnect all cables and AC power cord from the Power Supply Module.