MNL000423.doc
Revision 01
09/18/2018
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
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58
WARNING
The user is strongly cautioned against changing the positions of the switches
for the thermal cut out unless they have prior authorization from an Versum
Materials, Inc. representative.
The temperature probe contains an independent thermal sensor that will cut the high
power to the heater/TEC circuit should the controller malfunction. The following table
defines the temperature cutouts and the maximum set point value for the various dip
switch configurations used by the different models. The circuit is accurate to 0.5ºC and
has a hysteresis of 0.1ºC.
The processor monitors the dip switch settings and adjusts the maximum set point
value accordingly.
Table 5.3
Thermal Cutout Switch Configuration
Dip Switch
Configuration
Thermal
Cutout Value
Max. Set Point
Setting
Model
1
28ºC
22ºC
VG300
2
70ºC
60ºC
VG600
3
120ºC
115ºC
VG600 HT
The last bit of the switch is for the temperature probe hardware interlock. This is set to
the ON position by default. This will enable the “Probe Not Installed” hardware interlock
alarm circuitry.
